慶應義塾研究者情報データベース

総合紹介 【 表示 ／ 非表示 】

総合紹介 【 表示 ／ 非表示 】

• 高付加価値型ものづくりを実現するための、マイクロ・ナノ領域での材料除去・変形および物性制御に基づく高精度・高効率・省エネ・省資源の加工技術の研究開発に取り組んでいる。特に超精密機械加工、マイクロ・ナノ構造形成、レーザ加工・欠陥修復などを中心に新技術の提案ならびにその原理の解明を進めている。

経歴 【 表示 ／ 非表示 】

経歴 【 表示 ／ 非表示 】

• 2000年04月

  -

  2001年09月

  東北大学工学研究科助手

• 2001年10月

  -

  2005年03月

  北見工業大学助教授

• 2005年04月

  -

  2007年03月

  東北大学工学研究科助教授

• 2007年04月

  -

  2012年03月

  東北大学工学研究科准教授

• 2012年04月

  -

  継続中

  慶應義塾大学理工学部教授

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学歴 【 表示 ／ 非表示 】

学歴 【 表示 ／ 非表示 】

• 1991年07月

  吉林大学, 工学部, 機械工学科

  大学, 卒業

• 1994年03月

  吉林大学, 工学研究科, 機械工学専攻

  大学院, 修了, 修士

• 1996年01月

  清華大学, 工学研究科, 精密機械学専攻

  大学院, 退学, 博士

• 2000年03月

  東北大学, 工学研究科, 機械電子工学専攻

  大学院, 修了, 博士

学位 【 表示 ／ 非表示 】

学位 【 表示 ／ 非表示 】

• 博士（工学）, 東北大学, 課程, 2000年03月

研究分野 【 表示 ／ 非表示 】

研究分野 【 表示 ／ 非表示 】

• ものづくり技術（機械・電気電子・化学工学） / 加工学、生産工学 （精密工学・機械加工学）

• ナノテク・材料 / 材料加工、組織制御 （材料加工・処理）

• ナノテク・材料 / ナノマイクロシステム （マイクロ・ナノデバイス）

• ナノテク・材料 / 複合材料、界面 （応用物性・結晶工学）

研究キーワード 【 表示 ／ 非表示 】

研究キーワード 【 表示 ／ 非表示 】

• 超精密加工

• マイクロ・ナノ加工

• レーザプロセッシング

• 電気加工

• ナノメカニクス

著書 【 表示 ／ 非表示 】

著書 【 表示 ／ 非表示 】

• Ultraprecision Machining and Metrology

  J. Yan, CRC Press, 2025年09月,  ページ数： 352

  担当範囲: 1-352

• Micro and nanoscale laser processing of hard brittle materials

  J. Yan and N. Takayama, Elsevier B.V., 2019年11月,  ページ数： 242

  担当範囲: 1-242

• Micro and Nano Fabrication Technology

  J. Yan (ed.), Springer Nature Singapore Pte Ltd., 2018年05月

  担当範囲: 1-959

• Comprehensive Materials Processing: Volume 1-13, Second edition

  Huang W., J. Yan , 2024年01月,  ページ数： 180-204

  担当範囲: Chapter 10.08 Ultra-precision grooving technologies

  　概要を見る

  Fabricating microgrooves on part surfaces is a way to provide advanced functionality of the parts, which has recently increased in several fields, such as biotechnology, optics, and aerospace. Considerable progress has been achieved in groove-cutting technology with the equipment development, process optimization and mechanisms understanding. This chapter reviews the ultraprecision cutting technologies for manufacturing of microgrooves and microgroove-based microstructures on various materials. Major cutting methods and their principles/mechanisms for microgrooving have been introduced. The main challenges in the cutting of microgrooves on ductile materials and brittle materials, respectively, are pointed out. Some innovations in groove-cutting technology are also highlighted. Several aspects in demand for further research and development are provided.

  • Access to Document (DOI)

• Advanced Ceramic Coatings: Fundamentals, Manufacturing, and Classification, R. K. Gupta, A. Motallebzadeh, S. Kakooei, T. A. Nguyen, A. Behera (eds.)

  P. J. Liew, J. Yan, C. Y. Yap, Elsevier B. V., 2023年06月

  担当範囲: Chapter 19: Electrical discharge coating with quarry dust powder suspension,  担当ページ： 433-460

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論文 【 表示 ／ 非表示 】

論文 【 表示 ／ 非表示 】

• Micromachining of Carbon Fiber Reinforced Plastics Using Femtosecond Pulsed Laser

  Konishi, Y; Yan, JW

  NANOMANUFACTURING AND METROLOGY 8 （ 1 ）  2025年12月

  ISSN  2520-811X

  　概要を見る

  Microscale grooves and holes were fabricated in carbon fiber reinforced plastics (CFRPs) using femtosecond pulsed laser irradiation, and the characteristics and mechanisms of laser processing were investigated. The relationship between laser fluence and ablation depth was established by measuring the cross-sectional profiles of the microgrooves produced at different laser fluences. Furthermore, the effect of the angle between the edge of the micro holes and the carbon fibers was examined by analyzing the edges and wall surfaces of circular and rectangular holes. Experimental results revealed that the laser processing mechanism was strongly dependent on fiber orientation due to significant heat conduction along carbon fibers. The findings of this study contribute to a deeper understanding of the ultrashort pulsed laser processing characteristics and mechanisms for creating small holes in CFRPs and emphasize the possibility of drilling high-precision holes that can be used in the direct bonding of sensors/IC chips to CFRPs.

  • Access to Document (DOI)

• Effect of System Dynamics on Surface Topography in Fast Tool Servo-Based Diamond Turning of Microlens Arrays

  Hashimoto T., Yan J.

  Nanomanufacturing and Metrology 8 （ 1 ）  2025年12月

  ISSN  2520811X

  　概要を見る

  A lens array is often used for optical components of sensing devices, requiring high surface quality and form accuracy. Fast tool servo (FTS)-based diamond turning is one of the technologies for manufacturing complicated shapes, such as freeform optics, structured surfaces, and microlens arrays, with high machining efficiency. In this study, lens array machining was performed on copper using an FTS on a diamond turning machine. For evaluating the lens array surface topography, the focus was on surface waviness formation. As a dominating factor of surface waviness, the system dynamics behavior was investigated by capturing and analyzing the position signal. It was found that a specific waviness pattern could be formed on the surface due to the servo response. By considering the dynamics of the FTS system from the captured signals, the FTS system behavior was identified, and optimal machining parameters for the lens array were proposed. A machining test under the optimized cutting conditions reduced the average Sdq used to quantify the waviness amount from 93 to 50 µrad and the standard deviation from 33 to 3 µrad, which greatly improved the consistency in accuracy for all lens arrays. This study will contribute to the appropriate utilization of FTS systems in the ultraprecision machining of various advanced optics, such as microlens arrays.

  • Access to Document (DOI)

• Fabrication of Groove-with-Protrusion Surface Structures on Oxygen-Free Copper Using a Laser-Engineered Burnishing Tool

  Otani A., Yan J.

  Nanomanufacturing and Metrology 8 （ 1 ）  2025年12月

  ISSN  2520811X

  　概要を見る

  Microtextured surfaces, such as those with groove, hole, or protrusion structures, are widely used in various industries for bonding dissimilar materials because of their anchor effect, which enhances adhesion and penetration with other materials. Although surfaces with grooves and protrusions are expected to show higher bonding strength, it is difficult to fabricate such hybrid structures using a material removal process or additive manufacturing. This study established a new burnishing method using a tool with preformed microgrooves at the tip to fabricate groove-with-protrusion structures on metal surfaces by plastic deformation. The tip of a ball-shaped polycrystalline diamond (PCD) tool was irradiated with a femtosecond pulsed laser to generate multiple trapezoid ten-micron scale grooves. Burnishing was then conducted on an oxygen-free copper surface to investigate the characteristics and mechanism of the burnishing-induced plastic deformation behaviors. The results showed that protrusions and grooves, which were several tens of micrometers in height and depth, were simultaneously produced along the tool path on the material surface. Tool sliding on the workpiece induced shear stress, which mainly triggered dislocation movement and plastic deformation enhancement. Cross-sectional observation revealed that grain elongation and refinement remarkably increased with the burnishing depth, indicating that the shear stress from burnishing produced refined grains that flowed and formed the protrusions. This research demonstrates the feasibility of a highly efficient method for simultaneously generating groove-with-protrusion structures with enhanced surface properties.

  • Access to Document (DOI)

• Fabrication of convex and concave microstructures on Ti6Al4V via nanosecond laser texturing and their distinct effects on surface wettability

  Wang C., Li L., Huang H., Yan J.

  Journal of Manufacturing Processes 152   616 - 630 2025年10月

  ISSN  15266125

  　概要を見る

  Precise control of surface microstructures is crucial for the functional design of advanced materials, particularly in applications such as superhydrophobic surfaces. However, current laser micro/nano fabrication techniques still face a persistent “easy-concave, hard-convex” challenge, where concave structures (e.g., microcraters and grooves) are readily produced but the fabrication of convex structures (e.g., micropillars, bulges) remains difficult. Consequently, the underlying mechanisms governing the functional difference between convex and concave structures are still not clear. In this study, both convex and concave microstructures were successfully fabricated on Ti6Al4V surfaces by optimizing the parameter window of nanosecond laser irradiation. The evolution of surface morphology under various laser parameters was systematically explored, and the formation mechanisms were clarified through the coupling effects of Marangoni convection and recoil pressure. Convex and concave arrays with varying hatch distances were fabricated and subjected to annealing treatment for comparatively studying their difference in wettability. After annealing, concave structures consistently exhibited superhydrophobicity, whereas convex structures demonstrated hydrophobicity or superhydrophobicity depending on the hatch distance. The mechanism underlying the difference in wettability was further revealed by analyzing the surface morphology and chemical composition. Furthermore, lossless liquid transportation was successfully realized by utilizing the adhesion difference between the convex and concave structures. This study not only offers a novel approach for constructing microstructures on titanium alloy surfaces but also provides new insights into the functional difference between convex and concave structures.

  • Access to Document (DOI)

• Towards understanding the ultrasonic vibration-assisted diamond cutting of ZnO crystals: Surface integrity and tool wear mechanism

  Huang W., Hashimoto T., Yan J.

  Journal of Materials Processing Technology 344 2025年10月

  ISSN  09240136

  　概要を見る

  Zinc oxide (ZnO) is a promising material for optics and optoelectronics. However, its machining methods are limited, with polishing being virtually the only available technique, which restricts the fabrication of complex shapes. In this study, for the first time, ultraprecision diamond cutting of single-crystal ZnO was explored. Conventional cutting (CC) and ultrasonic vibration-assisted cutting (UVC) experiments were performed in dry and oil mist lubrication environments. It was found that under dry conditions, both CC and UVC resulted in surface fractures owing to the oxidation-induced chemical tool wear. Using oil mist lubrication significantly reduced tool wear, particularly for UVC. As a result, surface roughness was reduced to 1.9 nm Sa. Cutting in the [11−20] direction was more likely to achieve crack-free surfaces on ZnO than cutting in the [1−100] direction under CC; however, the machinability in cutting in the [1−100] direction was improved by applying UVC. Both CC and UVC processes activated basal and pyramidal slip systems in the subsurface region, accompanied by a high density of dislocations located immediately beneath the surface. UVC further promotes polycrystallization and pyramidal slip activity in the subsurface. A microlens array was fabricated with a surface form error of less than 49 nm peak-to-valley and a surface roughness of less than 2.2 nm Sq by integrating slow tool servo diamond turning with ultrasonic vibration assistance under oil mist lubrication. This study reveals the fundamental cutting characteristics of ZnO, provides guidance for ultraprecision cutting of brittle oxide crystals, and validates a potential solution for fabricating micro-structures on ZnO surfaces.

  • Access to Document (DOI)

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総説・解説等 【 表示 ／ 非表示 】

総説・解説等 【 表示 ／ 非表示 】

• フェムト秒パルスレーザによる溶融石英のマイクロキャビティ加工

  閻 紀旺

  ツールエンジニア 66 （ 8 ） 83 - 87 2025年07月

  記事・総説・解説・論説等（学術雑誌）, 単著, 筆頭著者

• レーザ活用による高付加価値創造マイクロ・ナノ加工

  閻 紀旺

  機械と工具 14 （ 11 ） 8 - 15 2024年11月

  記事・総説・解説・論説等（学術雑誌）, 単著, 筆頭著者

• レーザ微細加工による機能表面の製作

  閻 紀旺

  レーザ協会誌 49 （ 1 ） 20 - 25 2024年11月

  記事・総説・解説・論説等（商業誌、新聞、ウェブメディア）, 単著

• 金属付加製造品のレーザ研磨技術

  閻 紀旺

  砥粒加工学会誌 67 （ 8 ） 440 - 443 2023年08月

  記事・総説・解説・論説等（学術雑誌）, 単著, 筆頭著者

• 硬脆材料の超精密延性モード加工

  閻 紀旺

  日本機械学会誌 125 （ 1247 ） 11 - 14 2022年10月

  記事・総説・解説・論説等（学術雑誌）, 単著, 筆頭著者, 責任著者

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研究発表 【 表示 ／ 非表示 】

研究発表 【 表示 ／ 非表示 】

• Scale-bridging surface structuring for functional performance improvement of components

  J. Yan

  7th CIRP CSI Conference on Surface Integrity 2024 （ブレーメン） , 

  2024年05月

  , 

  口頭発表（基調）

• Tool Dynamics-induced Surface Topography Error in Fast Tool Servo-Based Diamond Turning of Micro Dome Arrays

  T. Hashimoto, J. Yan

  7th CIRP CSI Conference on Surface Integrity 2024 （ブレーメン） , 

  2024年05月

  , 

  口頭発表（一般）

• Influences of tool tip geometry on surface/subsurface damage formation in nanoscratching of single-crystal 4H-SiC

  W. Huang, J. Yan

  7th CIRP CSI Conference on Surface Integrity 2024 （ブレーメン） , 

  2024年05月

  , 

  口頭発表（一般）

• Ultraprecision manufacturing for small optics

  J. Yan

  Nanotechnology and Precision Engineering (NPE) International Series Forum （Online） , 

  2024年04月

  , 

  口頭発表（招待・特別）

• 自由曲面加工における工具姿勢に起因する切削メカニズム変化

  川上凜太朗，閻 紀旺

  精密工学会第31回学生会員卒業研究発表講演会 （東京） , 

  2024年03月

  , 

  口頭発表（一般）

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受賞 【 表示 ／ 非表示 】

受賞 【 表示 ／ 非表示 】

• 日本機械学会賞（論文）

  L. Zhang, 佐藤裕亮, 閻 紀旺, 2024年04月, 日本機械学会, Optimization of fast tool servo diamond turning for enhancing geometrical accuracy and surface quality of freeform optics

  受賞区分： 国内学会・会議・シンポジウム等の賞

• IJEM Best Editor Award

  J. Yan, 2024年01月, International Journal of Extreme Manufacturing (IJEM), IoP publishing

  受賞区分： 学会誌・学術雑誌による顕彰

• 精密工学会論文賞

  Lin Zhang, Allen Yi, 閻 紀旺, 2023年03月, 精密工学会, Flexible fabrication of Fresnel micro-lens array by off-spindle-axis diamond turning and precision glass molding

  受賞区分： 国内学会・会議・シンポジウム等の賞

• 2022 IJEM Best Paper Award

  Y. Sato, J. Yan, 2023年03月, International Journal of Extreme Manufacturing (IJEM), IoP publishing, Tool path generation and optimization for freeform surface diamond turning based on an independently controlled fast tool servo

  受賞区分： 学会誌・学術雑誌による顕彰

• 工作機械技術振興賞（論文賞）

  笠井慎平, 袖平智樹, 閻 紀旺, 2021年06月, 工作機械技術振興財団, 炭素拡散反応を用いた形彫り放電加工による多結晶ダイヤモンドの３次元形状創製

  受賞区分： 出版社・新聞社・財団等の賞

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担当授業科目 【 表示 ／ 非表示 】

担当授業科目 【 表示 ／ 非表示 】

• 機械工学創造演習

  2025年度

• 総合デザイン工学特別研究第２

  2025年度

• 総合デザイン工学特別研究第１

  2025年度

• 加工学の基礎

  2025年度

• 工場見学

  2025年度

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所属学協会 【 表示 ／ 非表示 】

所属学協会 【 表示 ／ 非表示 】

• 日本機械学会, 

  1997年04月

  -

  継続中

• 精密工学会, 

  1997年04月

  -

  継続中

• 砥粒加工学会, 

  2000年04月

  -

  継続中

• レーザ協会, 

  2022年01月

  -

  継続中

• レーザ加工学会, 

  2009年01月

  -

  継続中

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委員歴 【 表示 ／ 非表示 】

委員歴 【 表示 ／ 非表示 】

• 2025年03月

  -

  継続中

  Fellow, Society of Manufacturing Engineers (SME)

• 2024年08月

  -

  継続中

  Fellow, The International Academy for Production Engineering (CIRP)

• 2024年04月

  -

  継続中

  Fellow (foreign), The Engineering Academy of Japan (EAJ)

• 2022年04月

  -

  継続中

  Fellow, The International Society for Nanomanufacturing (ISNM)

• 2022年03月

  -

  継続中

  理事・執行理事・出版部会長・校閲委員長, 精密工学会

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