Papers - Taguchi, Yoshihiro

Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability

Tsutsui T., Taguchi Y., Hashimoto M.

Journal of Micromechanics and Microengineering 35 ( 2 )  2025.02

ISSN  09601317

　View Summary

Kirigami design principles have been widely applied to develop thermally responsive shape-morphing devices across various scales. However, the multi-degree-of-freedom (multi-DoF) morphing capabilities of microelectromechanical-systems (MEMS)-scale kirigami devices under localized Joule heating remain largely unexplored. This paper presents a quadrant kirigami-type electrothermal MEMS actuator with multi-DoF morphing capabilities, demonstrating both one-dimensional piston motion and two-dimensional (2D) tilting motion. The actuator, fabricated using surface and bulk micromachining techniques, features four independent electrical circuits, creating four electrothermally separated quadrants within the MEMS-scale kirigami structure. The temperature distribution within each quadrant of the actuator, subjected to localized Joule heating, was experimentally examined using thermography, revealing distinct temperature contrasts. The actuator demonstrated multi-DoF morphing capabilities, achieving a 2D tilting angular displacement of approximately 10° at 70 mW and a vertical piston displacement of 1.5 mm at 135 mW. These experimental results validate that the electrothermal quadrant design, leveraging localized Joule heating, enhances the DoF morphing capabilities of kirigami-type electrothermal MEMS actuators.

• Access to Document (DOI)

Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization

Yu Yamashita, Yasuko Tanaka, Chen Tianzhou, Yoshihiro Taguchi, and Masaaki Hashimoto

Mechanical Engineering Journal  2024

Accepted

　View Summary

(Accepted)

2光子マイクロ光造形とフェムト秒レーザアブレーションを用いた熱駆動ソフトマイクロアクチュエータ作製の基礎検討

陳天州, 田口良広, 橋本将明

熱物性  2024

Accepted

Bimorph Thermal Microactuator Fabricated by Additive and Subtractive Femtosecond Laser Processing

Chen T., Taguchi Y., Hashimoto M.

International Conference on Optical MEMS and Nanophotonics  2024

ISSN  21605033

　View Summary

This study presents an additive and subtractive fabrication method for a bimorph thermal microactuator using TPP 3D printing and femtosecond laser ablation. First, a microcantilever with a thickness of 30 μm was printed by TPP 3D printing. Second, femtosecond laser ablation was utilized to reduce the thickness to 15 μm, which facilitated the creation of a bimorph structure. The cantilever-shaped bimorph microactuator demonstrated stable cyclic actuation, achieving a tip displacement of 11.5 μm through laser heating.

• Access to Document (DOI)

Design of focus-tunable freeform microlens printed on kirigami MEMS actuator

Matsuoka Y., Tsutsui T., Taguchi Y., Hahsimoto M.

International Conference on Optical MEMS and Nanophotonics  2024

ISSN  21605033

　View Summary

This study proposes the design of a focus-tunable freeform microlens printed on a MEMS actuator. The proposed freeform microlens, designed with its varying surface curvature along the azimuthal direction, can adjust its focal length through the tilt motion of the MEMS actuator. The designed freeform microlens was printed onto a glass substrate, and demonstrated focus tunability ranging from 0.31 mm to 3.72 mm.

• Access to Document (DOI)

Fabrication and characterization of VO<inf>2</inf> kirigami electrothermal MEMS actuator

Tsutsui T., Taguchi Y., Hashimoto M.

International Conference on Optical MEMS and Nanophotonics  2024

ISSN  21605033

　View Summary

A kirigami electrothermal MEMS actuator using the phase transition material VO2 has been proposed. This paper reports the fabrication process and mechanical characteristics of the actuator. The actuator was fabricated by MEMS processes with VO2 annealing method. Through the environmental heating, the actuator exhibited the bi-directional actuation due to the thermal expansion and phase transition shrinkage of VO2, resulting in a net downward displacement of 219.5 μm.

• Access to Document (DOI)

Fabrication of a Soft Photothermal Microactuator Using Two-photon Polymerization and Vacuum Filling

Tanaka K., Taguchi Y., Hashimoto M.

International Conference on Optical MEMS and Nanophotonics  2024

ISSN  21605033

　View Summary

A fabrication method of a soft photothermal microactuator using two-photon polymerization and vacuum filling is proposed. Proposed microactuator was fabricated through two processes: A two-photon polymerization (TPP) and a composite injection by a vacuum filling. First, a PDMS microcantilever with a microfluidic channel was printed by TPP. Second, a PDMS composite containing thermally expandable microspheres was filled in the microfluidic channel. To validate this method, a microactuator with dimensions of 1 mm × 130 μm × 100 μm was fabricated. We demonstrated the ability of the soft photothermal microactuator to produce displacement of approximately 50 μm by laser heating.

• Access to Document (DOI)

Additive manufacturing method of electrothermal 4D bimorph microactuator

Masaaki Hashimoto, Takaya Sato, Yoshihiro Taguchi,

Sensors and Actuators: A. Physical  356 ( 114348 )  2023.06

Research paper (scientific journal), Joint Work, Last author, Corresponding author, Accepted

　View Summary

This paper presents an additive manufacturing method of an electrothermally controllable 4D-printed bimorph microactuator. We fabricated an electrothermal 4D bimorph microactuator equipped with an electrical heater through a two-step additive process: two-photon polymerization (TPP) 4D printing and liquid metal microfluidic injection. First, a 3D thermal bimorph microstructure including a microchannel was built using TPP printing. Second, the printed microstructure was electrically wired by injecting a liquid metal into the microchannel. To validate this method, we fabricated and characterized a vertical-spiral-shaped electrothermal 4D rotary microactuator with a large angular displacement. The fabricated electrothermal microactuator successfully controlled its temperature and angular displacement via electricity. Furthermore, we experimentally demonstrated the unique ability of the electrothermal 4D bimorph microactuator to produce repeatable large angular displacements of more than 10° at 386 mV. Accordingly, the proposed method is expected to enhance the spatial design freedom of electrothermal microactuators with potential applications in soft microrobotics.

• Access to Document (DOI)

Design of Bi-Directional VO<inf>2</inf>-Kirigami Electrothermal Microactuator with Millimeter Large Stroke

Hashimoto M., Tsutsui T., Taguchi Y.

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023    741 - 744 2023

　View Summary

This paper reports the design of a bi-directional VO2-KIRIGAMI electromechanical microactuator with a large millimeter stroke and low power consumption. Using Finite Element Method (FEM) simulation, it has been demonstrated that the proposed VO2-KIRIGAMI design can achieve a remarkable stroke of 2.2 mm with a power consumption of only 54 mW. This design study has enabled the application of electrothermal microactuators in long-range lens focusing for endoscopic procedures.

Development of a Millimeter-Stroke Electrothermal Kirigami MEMS Actuator with Low Driving Power -Static and Dynamic Thermomechanical Characteristic of Film Bimorph-

Masaaki Hashimoto, Yoshihiro Taguchi

Netsu Bussei 34 ( 4 ) 109 - 116 2020.07

Research paper (scientific journal), Joint Work, Last author, Corresponding author, Accepted

• Access to Document (DOI)

Circular pyramidal kirigami microscanner with millimeter-range low-power lens drive

Hashimoto M., Taguchi Y.

Optics Express (Optics Express)  28 ( 12 ) 17457 - 17467 2020.06

　View Summary

© 2020 Optical Society of America under. This paper proposes an electrothermally-actuated circular pyramidal kirigami microscanner with a millimeter-range low-power lens drive for endoscopic biomedical applications. A variation of Japanese origami art, kirigami involves creation of out-of-plane structures by paper cutting and folding. The proposed microscanner is composed of freestanding kirigami film on which the spiral-curved thermal bimorphs are strategically placed. The kirigami microscanner is electrothermally transformed into an out-of-plane circular multistep pyramid by Joule heating. The circular pyramidal kirigami microscanner on a small footprint of 4.5 mm 4.5 mm was fabricated by microelectromechanical system processes. A large four-step pyramidal actuation was successfully demonstrated, and a large 1.1-mm lens travel range at only 128 mW was achieved.

• Access to Document (DOI)

Design and fabrication of a kirigami-inspired electrothermal MEMS scanner with large displacement

Hashimoto M., Taguchi Y.

Micromachines (Micromachines)  11 ( 4 )  2020.04

　View Summary

© 2020 by the authors. Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner's feasibility and potential for large-displacement scanning with a high fill factor.

• Access to Document (DOI)

Development of a robust autofluorescence lifetime sensing method for use in an endoscopic application

Ito S., Hashimoto M., Taguchi Y.

Sensors (Switzerland) (Sensors (Switzerland))  20 ( 7 )  2020.04

　View Summary

© 2020 by the authors. Licensee MDPI, Basel, Switzerland. Endoscopic autofluorescence lifetime imaging is a promising technique for making quantitative and non-invasive diagnoses of abnormal tissue. However, motion artifacts caused by vibration in the direction perpendicular to the tissue surface in a body makes clinical diagnosis difficult. Thus, this paper proposes a robust autofluorescence lifetime sensing technique with a lens tracking system based on a laser beam spot analysis. Our optical setup can be easily mounted on the head of an endoscope. The variation in distance between the optical system and the target surface is tracked by the change in the spot size of the laser beam captured by the camera, and the lens actuator is feedback-controlled to suppress motion artifacts. The experimental results show that, when using a lens tracking system, the standard deviation of fluorescence lifetime is dramatically reduced. Furthermore, the validity of the proposed method is experimentally confirmed by using a bio-mimicking phantom that replicates the shape, optical parameters, and chemical component distribution of the cancerous tissue.

• Access to Document (DOI)

Kirigami-inspired Electrothermal Actuator for Motion Tracking Blood Flow Measurement

Hashimoto M., Taguchi Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2019-July   152 - 153 2019.07

　View Summary

© 2019 IEEE. A large stroke electrothermal MEMS actuator with small device footprint and low driving voltage has been proposed for motion tracking blood flow measurement. This paper reports this kirigami-inspired device design and simulation results of the proposed actuator.

• Access to Document (DOI)

Nanoparticle sorting technique using laser induced dielectrophoresis with phase modulated interference

Miura D., Taguchi Y., Nagasaka Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2019-July   100 - 101 2019.07

　View Summary

© 2019 IEEE. A novel nanoparticle sorting technique using the laser-induced dielectrophoresis (LIDEP) and phase modulated interference has been developed. In this paper, a proposed method of nanoparticle sorting and fabrication of microfluidic device are reported, and the validity of a method is discussed.

• Access to Document (DOI)

Rapid and label-free sensing of intermolecular interactions using compact optical diffusion sensor

Kamata M., Takaba Y., Taguchi Y., Nagasaka Y.

International Journal of Heat and Mass Transfer (International Journal of Heat and Mass Transfer)  133   73 - 79 2019.04

　View Summary

© 2018 The Authors Diffusion sensors for nano-sized materials dispersed in a solution are promising tools for investigating intermolecular interactions, which is an important task in a wide range of industrial and biomedical fields, such as the development of therapeutic products and diagnostic tools. For the development of the sensor applicable to point-of-care testing, an optofluidic sensor was proposed. The proposed sensor realizes a simple measurement in a short time using microscale manipulation by interferometrically-induced dielectrophoresis and optical detection. In this paper, the applicability of the proposed sensor to distinguish nanoscale differences in size was confirmed by measurements on a solution containing size-certified plain nano-beads (51 nm, 100 nm, 203 nm, 216 nm and 240 nm) with evaluating the uncertainties of the proposed sensor. Furthermore, measurements using 200-nm beads coated with functional groups (NH2 and biotin) and proteins (streptavidin and bovine serum albumin) demonstrated the applicability to the investigation of intermolecular interactions.

• Access to Document (DOI)

Non-contact optical hand-held viscosity sensor with incident angle and irradiation timing controls

Eguchi M., Taguchi Y., Nagasaka Y.

Optics Express (Optics Express)  26 ( 26 ) 34070 - 34080 2018.12

　View Summary

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. This paper proposes a novel optical hand-held viscosity sensor based on a laser-induced capillary wave method that can be used as a noncontact and quick in situ viscometry of liquid samples. Incident angle and irradiation timing control systems were integrated into the hand-held viscosity sensor to robustly measure viscosity by detecting the optical signal in a hand-held condition. We report the stability evaluation of these systems under the hand-held condition. Finally, the proposed sensor’s applicability to the hand-held viscometer was confirmed by measuring the viscosity distribution that the temperature gradient of the liquid sample caused.

• Access to Document (DOI)

Coding two-dimensional patterns into mode spectrum of silicon microcavity covered with a phase-change film

Sobhi F., Kihara Y., Kataiwa D., Taguchi Y., Kuwahara M., Saiki T.

Applied Physics A: Materials Science and Processing (Applied Physics A: Materials Science and Processing)  124 ( 11 )  2018.11

　View Summary

© 2018, Springer-Verlag GmbH Germany, part of Springer Nature. In the present study, we propose a new approach for coding two-dimensional patterns (spatial information or images) into mode spectra of a silicon microcavity. Electric field distributions associated with each cavity mode generated by the microcavity provide a basis (dictionary) for image encoding. The cavity is covered with a layer of phase-change material (Ge2Sb2Te5; GST), which enables the electric field distribution to be memorized and the images to be encoded into absorption spectra via the difference in the refractive index between the crystalline and amorphous phases. In numerical simulations, a clear modification of the absorption spectra of the GST layer upon partial crystallization was demonstrated. We fabricated silicon microcavities covered with a GST layer and confirmed that spectral features originating from individual cavity modes can be greatly modified upon phase change.

• Access to Document (DOI)

A Study on a Single Cell Thermometry Using Fluorescence in Near-Field

Tamura A., Taguchi Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2018-July 2018.09

　View Summary

© 2018 IEEE. An in-vitro method for temperature mapping of a single cell using fluorescence in near-field and a membrane window is developed. In this paper, we report analytical results which indicate the feasibility of our method.

• Access to Document (DOI)

Plastic Based Microfluidic Chip for Optical Diffusion Sensor Using Laser-Induced Dielectrophoresis

Okuwaki T., Kamata M., Taguchi Y., Nagasaka Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2018-July 2018.09

　View Summary

© 2018 IEEE. A novel plastic based microfluidic chip for the optical diffusion sensor using the laser-induced dielectrophoresis is designed and fabricated. The diffusion signal of the first-order diffracted light was detected by using our proposed microfluidic chip.

• Access to Document (DOI)

Development of Near-Field Infrared Thermometry

Miura H., Taguchi Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2018-July 2018.09

　View Summary

© 2018 IEEE. Nanoscale thermometry is important for the thermal design of micro and nanodevices. In the measurement, a non-contact, non-destructive method is effective. Our method provides a nanoscale infrared thermometry with a tapered highly efficient near-field fiber probe.

• Access to Document (DOI)

Development of Electrothermal Fresnel Mirror for Use in Micro Optical Diffusion Sensing Platform

Nakagawa T., Taguchi Y., Nagasaka Y.

International Conference on Optical MEMS and Nanophotonics (International Conference on Optical MEMS and Nanophotonics)  2018-July 2018.09

　View Summary

© 2018 IEEE. A novel micro optical diffusion sensor enabling a high-speed and a small sample volume measurement has been developed. The proposed electrothermal actuators can achieve a miniaturization of the optical diffusion sensor. In this paper, a design of MEMS mirror with a long working distance is reported, and the validity of the mirror is discussed.

• Access to Document (DOI)

Design of an optofluidic diffusion sensor by transient grating using dielectrophoresis

Kamata M., Taguchi Y., Nagasaka Y.

Optics Express (Optics Express)  26 ( 13 ) 16970 - 16983 2018.06

　View Summary

© 2018 Optical Society of America. An optofluidic diffusion sensor using laser-induced dielectrophoresis in a device with a sputtered a-Si:H layer is presented. Diffusion sensors enabling high-speed measurement have important potential uses as bio-sensors and for quantitative analysis of nano-sized products. The present sensor was developed for measurement in a few seconds by optic observations of the sample diffusion from transient grating formed by laser-induced dielectrophoresis. As a photoconductive layer for the proposed device, we used a sputtered a-Si:H film. The optical (refractive index and extinction coefficient), structural (Raman and IR spectroscopy), and optoelectronic properties of this film, as well as its applicability to the proposed device are characterized. Nano-sized beads were measured by the fabricated device, and its performance as a diffusion sensor was validated.

• Access to Document (DOI)

簡易・迅速なin situ測定を実現する光学式ハンドヘルド粘性センサの開発

TAGUCHI Yoshihiro

日本機械学会論文集 84 ( 360 ) 17-00572/1 - 17-00572/13 2018

Research paper (scientific journal), Joint Work, Accepted

• Access to Document (DOI)

Motion Tracking System for Robust Non-Contact Blood Perfusion Sensor

Hashimoto, M., and Taguchi, Y.,

Sensors (Sensors (Switzerland))  18 ( 277 )  2018

Research paper (scientific journal), Joint Work, Accepted

　View Summary

© 2018 by the authors. Licensee MDPI, Basel, Switzerland. We propose a motion-robust laser Doppler flowmetry (LDF) system that can be used as a non-contact blood perfusion sensor for medical diagnosis. Endoscopic LDF systems are typically limited in their usefulness in clinical contexts by the need for the natural organs to be immobilized, as serious motion artifacts due to the axial surface displacement can interfere with blood perfusion measurements. In our system, the focusing lens moves to track the motion of the target using a low-frequency reference signal in the optical data, enabling the suppression of these motion artifacts in the axial direction. This paper reports feasibility tests on a prototype of this system using a microfluidic phantom as a measurement target moving in the direction of the optical axis. The frequency spectra detected and the perfusion values calculated from those spectra show that the motion tracking system is capable of suppressing motion artifacts in perfusion readings. We compared the prototype LDF system’s measurements with and without motion feedback, and found that motion tracking improves the fidelity of the perfusion signal by as much as 87%.

• Access to Document (DOI)

Motion-robust blood perfusion sensing by LDF with focus control

Masaaki H., Yoshihiro T.

International Heat Transfer Conference (International Heat Transfer Conference)  2018-August   585 - 590 2018

　View Summary

© 2018 International Heat Transfer Conference. All rights reserved. For endoscopic Laser Doppler flowmetry (LDF), motion artifacts present a serious challenge for clinical applications. We propose a motion-robust LDF method that eliminates motion artifacts by controlling the lens positon with a feedback signal representing tissue motion. This method could be applied to an endoscopic device with micro-electro-mechanical-systems (MEMS) technology. To demonstrate the feasibility of the proposed method, a bench-top apparatus was constructed, and a blood flow phantom was used as the measurement target. Experimental tests shows that the controlled lens was moved to the target position under phantom movement, and the detected perfusion signal were stabilized by the focus control.

• Access to Document (DOI)

Nanoscale Optical Thermometry using a Time-correlated Single-photon Counting in an Illumination-collection mode

Seto, D., Nikka, R., Nishio, S., Taguchi, Y., Saiki, T. and Nagasaka, Y.,

Applied Physics Letters 110 ( 3 ) 033109 - 1-4 2017.01

Research paper (scientific journal), Joint Work, Accepted

Decay Time Control of Mass Diffusion in a Transient Grating using a Fringe-tunable Electrothermal Fresnel Mirror

Kiuchi, Y., Taguchi, Y., and Nagasaka, Y.,

Journal of Thermal Science and Technology 12 ( 2 ) 17-00301/1 - 17-00301/11 2017

Research paper (scientific journal), Joint Work, Accepted

• Access to Document (DOI)

Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor

Kiuchi, Y., Taguchi, Y., and Nagasaka, Y.,

Optics Express 25 ( 2 ) 758 - 767 2017

Research paper (scientific journal), Single Work, Accepted

Measurement of Out-of-plane Thermal Conductivity of Epitaxial YBa2Cu3O7- Thin Films in the Temperature Range from 10 K to 300 K by Photothermal Reflectance

Murakami, Y., Goto, H., Taguchi, Y., and Nagasaka, Y.,

International Journal of Thermophysics  2017

Research paper (scientific journal), Joint Work, Accepted

スパッタ成膜a-Si:Hを用いたレーザー誘起誘電泳動による光MEMS拡散センサーの開発

TAGUCHI Yoshihiro

熱物性 30 ( 2 ) 74 - 79 2016

Research paper (scientific journal), Accepted

Optical Observation of DNA Translocation through Al2O3 Sputtered Silicon Nanopores in Porous Membrane

Yamazaki, H., Ito, S., Esashika, K., Taguchi, Y., and Saiki, T.,

Applied Physics A 122 ( 3 ) 216 - 1-6 2016

Research paper (scientific journal), Joint Work, Accepted

Micro optical diffusion sensor using a comb-driven micro Fresnel mirror

Matoba, Y., Taguchi, Y., and Nagasaka, Y.

Opt. Express (Opt. Express)  23 ( 1 ) 477 - 483 2015.01

Research paper (scientific journal), Joint Work, Accepted

• Access to Document (DOI)

走査型プローブ顕微鏡を用いたナノスケール温度・熱物性計測技術

TAGUCHI Yoshihiro

計測と制御 54 ( 5 ) 321 - 326 2015

Research paper (scientific journal), Single Work, Accepted

スパッタ成膜a-Si:Hを用いたレーザー誘起誘電泳動による光MEMS拡散センサーの開発

TAGUCHI Yoshihiro

熱物性  2015

Research paper (scientific journal), Joint Work, Accepted

Thermal conductivity of semiclathrate hydrates and their solutions of tetra-n-butylammonium bromide (TBAB) and tetra-n-butylammonium chloride (TBAC) by the transient hot-wire using parylene-coated probe

Fujiura, K., Nakamoto, Y., Taguchi, Y., Ohmura, R., and Nagasaka, Y.

Fluid Phase Equilibria 413   129 - 136 2015

Research paper (scientific journal), Joint Work, Accepted

オーガナイズドセッション　MEMS技術を用いた熱物性デバイス

TAGUCHI Yoshihiro

熱物性 29 ( 1 ) 51 2015

Research paper (scientific journal), Joint Work, Accepted

Numerical analysis of the temperature dependence of near-field polarization for nanoscale thermometry using a triple-tapered near-field optical fiber probe

Nitta, J., Taguchi, Y., Saiki, T., and Nagasaka, Y.

J. Opt. (J. Opt.)  16   035001/1 - 7 2014.02

Research paper (scientific journal), Joint Work, Accepted

• Access to Document (DOI)

Report on 7th U.S.-Japan Joint Seminar on Nanoscale Transport Phenomena - Science and Engineering-

Cola, B., Daiguji, H., Dames, C., Fang, N., Fushinobu, K., Inoue, S., Kikugawa, G., Kohono, M., Kumar, S., Li, D.Y., Malen, J.A., McGaughey, A., Nakabeppu, O., Pipe, K., Shen, S., Shi, L., Shibahara, M., Taguchi, Y., Takahashi, K., Yamamoto, T., Zolotoukhina, T.

Nanoscale and Microscale Thermophysical Engineering    25-49 2013.04

Research paper (conference, symposium, etc.), Joint Work, Accepted

FDTD法を用いた近接場フォトサーマル効果のナノスケール温度分布解析

福山祥平, 田口良広

日本機械学会論文集（B編） 79 ( 806 ) 2254-2263 2013

Research paper (scientific journal), Joint Work, Accepted

Size Effect of out-of-plane Thermal Conductivity of Epitaxial YBa2Cu3O7- Thin Films at Room Temperature Measured by Photothermal Radiometry

Ikeda, T., Ando, T., Taguchi, Y., and Nagasaka, Y.

Journal of Applied Physics 113   183517-1-7 2013

Research paper (scientific journal), Single Work

パリレン絶縁プローブ非定常細線法によるTBABハイドレートの熱伝導率測定

永冨達也, 田口良広, 大村亮, 長坂雄次

日本機械学会論文集（B編） 79 ( 802 ) 94-102 2013

Research paper (scientific journal), Joint Work, Accepted

機械工学年鑑－熱力学・熱物性－

TAGUCHI Yoshihiro

日本機械学会誌 115 ( 1125 ) 551-552 2012

Research paper (scientific journal), Single Work, Accepted

Development of Interferometrical Excitation Device for Micro Optical Diffusion Sensor Using Laser-induced Dielectrophoresis

Oka, T., Itani, K., Taguchi, Y., and Nagasaka, Y.

Journal of Microelectromechanical Systems 21 ( 2 ) 324-330 2012

Research paper (scientific journal), Single Work

Near-field Fluorescence Thermometry using Highly Efficient Triple-tapered Near-field Optical Fiber Probe

Fujii, T., Taguchi, Y., Saiki, T., and Nagasaka, Y.

Review of Scientific Instruments 83   124901-1-8 2012

Research paper (scientific journal), Single Work

第32回日本熱物性シンポジウム報告

田口 良広, 長坂雄次

熱物性 26 ( 1 ) 28-31 2012

Research paper (conference, symposium, etc.), Joint Work, Accepted

オーガナイズドセッション：マイクロ・ナノスケールの熱物性とシステムデザイン

田口 良広, 八木貴志, 宮崎康次

熱物性 26 ( 1 ) 32 2012

Research paper (conference, symposium, etc.), Joint Work, Accepted

Study on Nanoscale Temperature Distribution for the Patterning of Self-Assembled Monolayers Using Near-Field Photothermal Desorption

Yamamoto, Y., Taguchi, Y., and Nagasaka, Y.

Journal of Thermal Science and Technology 6 ( 3 ) 436-448 2011.11

Research paper (scientific journal), Joint Work, Accepted

Fusion-spliced Near-field Optical Fiber Probe Using Photonic Crystal Fiber for Nanoscale Thermometry Based on Fluorescence-Lifetime Measurement of Quantum Dots

Fujii, T., Taguchi, Y., Saiki, T., and Nagasaka, Y.

Sensors 11 ( 9 ) 8358-8369 2011.08

Research paper (scientific journal), Joint Work, Accepted

レーザー誘起誘電泳動を用いた小型拡散センサーに関する研究（集積化マイクロチップ開発に向けた信号検知手法の実験的検討）

猪谷　恒一，田口 良広，長坂　雄次

日本機械学会論文集（B編） 77 ( 779 ) 158-168 2011.07

Research paper (scientific journal), Joint Work, Accepted

Study on Nanoscale Temperature Distribution for the Patterning of Self-Assembled Monolayers Using Near-Field Photothermal Desorption

Yamamoto, Y., Taguchi, Y., and Nagasaka, Y.

Journal of Thermal Science and Technology 6 ( 3 ) 436-448 2011

Research paper (scientific journal), Single Work

レーザー誘起誘電泳動を用いた小型拡散センサーに関する研究（集積化マイクロチップ開発に向けた信号検知手法の実験的検討）

猪谷恒一, 田口良広, 長坂雄次

日本機械学会論文集（B編） 77 ( 779 ) 158-168 2011

Research paper (scientific journal), Single Work

Fusion-spliced Near-field Optical Fiber Probe Using Photonic Crystal Fiber for Nanoscale Thermometry Based on Fluorescence-Lifetime Measurement of Quantum Dots

Fujii, T., Taguchi, Y., Saiki, T., and Nagasaka, Y.

Sensors 11 ( 9 ) 8358-8369 2011

Research paper (scientific journal), Single Work

偏光した近接場光を用いたナノスケール温度測定手法の開発

保坂俊輔, 笠掛利彰, 田口良広, 長坂雄次

日本機械学会論文集（C編） 76 ( 768 ) 46-48 2010

Research paper (scientific journal), Single Work

Development of a Micro Optical Diffusion Sensor Using Laser-Induced Dielectrophoretic Manipulation

Itani, K., Ebisui, A., Taguchi, Y., and Nagasaka, Y.

Heat Transfer-Asian Research 39 ( 5 ) 344-354 2010

Research paper (scientific journal), Single Work

光学式粘性センサーを用いたリアルタイムモニタリング実現性の検討

阿部広, 長町隆介, 田口良広, 長坂雄次

日本機械学会論文集(C編) 76 ( 768 ) 43-45 2010

Research paper (scientific journal), Single Work

レーザー誘起誘電泳動を用いた小型拡散センサーの開発

猪谷恒一, 蛭子井明, 田口良広, 長坂雄次

熱物性 23 ( 4 ) 197-202 2009

Research paper (scientific journal), Single Work

Development of Near-field Fluorescence Life-time Thermometry

Taguchi, Y., Oka, T., Saiki, T., and Nagasaka, Y.

Nanoscale and Microscale Thermophysical Engineering 13 ( 2 ) 77-87 2009

Research paper (scientific journal), Single Work

Micro Optical Viscosity Sensor for in situ Measurement Based on a Laser-Induced Capillary Wave

Taguchi, Y., Nagamachi, R., and Nagasaka, Y.

Journal of Thermal Science and Technology 4 ( 1 ) 98-108 2009

Research paper (scientific journal), Single Work

Miniaturized optical viscosity sensor based on a laser-induced capillary wave

Taguchi, Y., Ebisui, A., and Nagasaka, Y.

Journal of Optics A: Pure and Applied Optics 10 ( 4 ) 044008-044013 2008

Research paper (scientific journal), Single Work

Development of Nanoscale Temperature Measurement Technique Using Near-field Fluorescence

Jigami, T., Kobayashi, M., Taguchi, Y. and Nagasaka, Y.

International Journal of Thermophysics 28 ( 3 ) 968-979 2008

Research paper (scientific journal), Single Work

Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy

Ra, H., Piyawattanametha, W., Taguchi, Y., Lee, D., Mandella, M.J., and Solgaard, O.,

Journal of Microelectromechanical Systems 16 ( 4 ) 969-976 2007

Research paper (scientific journal), Single Work

近接場光を利用したナノスケール熱物性測定の研究（単層カーボンナノチューブを用いた予備的測定）

田口良広, 堀口幸裕, 小林三香子, 斎木敏治, 長坂雄次

日本機械学会論文集（B編） 71 ( 712 ) 168-174 2005

Research paper (scientific journal), Single Work

Thermal Diffusivity Measurement of Isotopically Enriched 28-Si Single Crystal by Dynamic Grating Radiometry

Taguchi, Y. and Nagasaka, Y.

International Journal of Thermophysics 25 ( 2 ) 459-472 2004

Research paper (scientific journal), Single Work

Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics

Taguchi, Y. and Nagasaka, Y.

JSME International Journal 47 ( 3 ) 483-489 2004

Research paper (scientific journal), Single Work

動的格子加熱法を用いた高熱伝導薄膜の温度伝導率測定（薄膜測定理論および装置の開発）

田口良広, 長坂雄次

日本機械学会論文集(B編) 68 ( 665 ) 194-200 2002

Research paper (scientific journal), Single Work

Thermal Diffusivity Measurement of High-Conductivity Materials by Dynamic Grating Radiometry

Taguchi, Y. and Nagasaka, Y.

International Journal of Thermophysics 22 ( 1 ) 289-299 2001

Research paper (scientific journal), Single Work