Papers - Makabe, Toshiaki

Drift velocity of charged particles in gases: general relationship between drift velocities in position and velocity spaces

Toshiaki Makabe

Phys. Scr. 100   035615 (8pp)  2025.02

Research paper (scientific journal), Single Work

Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)

T. Makabe and H. Sugawara

Plasma Sources Sci. Technol. 33   093001 (23pp) 2024.09

Research paper (scientific journal), Joint Work, Accepted

Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode

Toshiaki Makabe

J. Phys. D. 56    045203 (17pp)  2023.01

Research paper (scientific journal), Single Work, Accepted

Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

Toshiaki Makabe

Jap. J. Appl. Phys. 61   026002(6pp) 2022.02

Research paper (scientific journal), Single Work, Accepted

Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 30   023001(16pp) 2021.02

Research paper (scientific journal), Single Work, Accepted

Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)

Toshiaki Makabe

Jap. J. Appl. Phys. 58   110101(21pp) 2019.11

Research paper (scientific journal), Single Work, Accepted

Metastables as a probe for low-temperature plasma characteristics in argon (Topical Review)

Toshiaki Makabe

J. Phys. D. 52   213002(21pp) 2019.02

Research paper (scientific journal), Single Work, Accepted

Velocity distribution of electrons in time-varying low-temperature plasmas: progress in theoretical procedures over the past 70 years (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 27   033001(22pp) 2018.03

Research paper (scientific journal), Single Work, Accepted

Expression for momentum-transfer scattering in inelastic collisions in electron transport in a collisional plasma

T. Makabe and R. WHITE

J.Phys.D: Appl.Phys. (IOP)  48   485205(4pp) 2015.11

Joint Work, Accepted

Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development

S. Dujko, Z. M. Raspopovic, R. D. White, T. Makabe and Z. Lj. Petrovic

Eur. Phys. J: D 68   166-(9pp) 2014

Research paper (scientific journal), Joint Work, Accepted

Effect of local gas heating on a plasma structure driven at radio frequency in a microcell in Ar at atmospheric pressure

M. Yamasaki, T. Yagisawa, and T. Makabe

Jpn. J. Appl. Phys. 53   036001(5pp) 2014

Research paper (scientific journal), Joint Work, Accepted

A set of cross sections and transport coefficients for electrons in HBr

O. Sasic, S. Dujko, T. Makabe, and Z. Lj. Petrovic

Chem. Phys. 398   154-9 2012

Research paper (scientific journal), Joint Work, Accepted

Low pressure nonequilibrium plasma for topdown nanoprocess

T. Makabe and T. Yagisawa

Plasma Sources Sci. Technol. 20   024011(12pp) 2011.04

Research paper (scientific journal), Joint Work, Accepted

Workshop on atomic and molecular collision data for plasma modelling: database needs for semiconductor plasma processing

T. Makabe and T. Tatsumi

Plasma Sources Sci. Technol. 20   024014(6pp) 2011.04

Research paper (scientific journal), Joint Work, Accepted

Actions of low- and high-energy electrons on the phase-transition between E and H modes in an inductively coupled plasma in Ar

Y. Hayashi, Y. Mitsui, T. Tatsumi, and T. Makabe

New J. Physics 13   073025(11pp) 2011

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

S. Morishita, Y. Hayashi, and T. Makabe

Plasma Sources Sci. Technol. 19   055007(4pp) 2010

Research paper (scientific journal), Joint Work, Accepted

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

T. Ohba and T. Makabe

Appl. Phys. Lett. 96   111501(3pp) 2010

Research paper (scientific journal), Joint Work, Accepted

Numerical Investigation of Relationship between Micro-Scale Pattern, Interfacial Plasma Structure, and Feature Profile during Deep-Si Etching in Two-Frequency Capacitively Coupled Plasma in SF6/O2

F. Hamaoka, T. Yagisawa, and T. Makabe

J.Phys.D: Appl. Phys. 42   075201(9pp) 2009

Research paper (scientific journal), Joint Work, Accepted

Nonequilibrium radio frequency plasma interacting with surface

T. Makabe and T. Yagisawa

Plasma Sources, Science and Technology 16   14016(9pp) 2009

Research paper (scientific journal), Joint Work, Accepted

A method for evaluations on the radiation trapping in an inductively coupled plasma in argon

C. Scharwitz and T. Makabe

J. Appl. Phys. 106   113304(8pp) 2009

Research paper (scientific journal), Joint Work, Accepted

Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2

Y. Hayashi, S. Hirao, Y. Zhang, T. Gans, D. O'connell, Z. Lj. Petrovic, and T. Makabe

J. Phys. D: Appl. Phys. 42   145206(6pp) 2009

Research paper (scientific journal), Joint Work, Accepted

Increased O(1D) metastable flux with Ar and Kr diluted oxygen plasmas and improved film properties of grown SiO2 film

T.Kitajima, N.Nakano, and T. Makabe

J.Vac. Sci. & Technol. A 26   1308-12 2008

Research paper (scientific journal), Joint Work, Accepted

A numerical investigation of atomic oxygen density in an inductively coupled plasma in O2/Ar mixture

T. Sato and T. Makabe

J.Phys.D:Appl.Phys. 41   035211(6pp) 2008

Research paper (scientific journal), Joint Work, Accepted

In situ measurement of plasma charging on SiO2 hole bottoms and reduction by negative charge injection during etching

T. Ohmori and T. Makabe

Appl.Surface Science 254   3696-709 2008

Research paper (scientific journal), Joint Work, Accepted

Diagnostics for low-energy electrons in a two-frequency capacitively coupled plasma in Ar

M. Ishimaru, T. Ohba, Y. Hayashi, T. Ohmori, K. Kitajima, and T. Makabe

Appl.Phys.Let. 92   071501(3pp) 2008

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of N2 dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

T. Kitajima, T. Nakano, S. Samukawa, and T. Makabe

Plasma Sources Sci. & Technol. 17   024018(7pp) 2008

Research paper (scientific journal), Joint Work, Accepted

Space- and time-resolved E-H transition in an inductively coupled plasma in Ar

S. Hirao, Y. Hayashi, and T. Makabe

IEEE Trans. Plasma Sci. 36   1410-11 2008

Research paper (scientific journal), Joint Work, Accepted

Modeling of Si etchig under effects of plasma molding in two-frequency capacitively coupled plasma in SF6/O2 for MEMS fabrication

F.Hamaoka, T.Yagisawa, and T.Makabe

IEEE Trans. on Plasma Sci. 35   1350-8 2007.10

Research paper (scientific journal), Joint Work, Accepted

Optical emission diagnostics of etching of low-k dielectrics in a two frequency inductively coupled plasma

M. Miyauchi, Y. Miyoshi, Zoran Lj. Petrovic, and T. Makabe

Solid-State Electonics 51   1418-24 2007.09

Research paper (scientific journal), Joint Work, Accepted

Plasma etching and feature evolution of organic low-k material by using VicAdress

T.Makabe, T.Shimada, and T.Yagisawa

Computer Physics Communications 177   64-7 2007.02

Research paper (scientific journal), Joint Work, Accepted

Guest editorial special issue on modeling and simulation of collisional low-temperature plasmas

D. J. Economou and T. Makabe

IEEE Trans. on Plasma Science 35   1194 2007

Research paper (scientific journal), Joint Work, Accepted

Effects of plasma modeling on feature profile of silicon micro-electro-mechanical systems through flux ion velocity distributions in two-frequency cpapcitively coupled plasma in SF6/O2

F. Hamaoka, T. Yagisawa, and T. Makabe

Jpn.J.Appl.Phys. 46   3059-65 2007

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients for electrons in mixtures of Ar and HBr

O.Sasic, S.Dujko, Z.Lj.Petrovic, and T.Makabe

Jpn.J.Appl.Phys. 46   3560-5 2007

Research paper (scientific journal), Joint Work, Accepted

Measurement of amount of pattern trim and surface chemistry for organic resist etching in an inductively coupled plasma in SO2-O2 gas mixtures

T. Goto and T. Makabe

Jpn.J.Appl.Phys. 46   5297-303 2007

Research paper (scientific journal), Joint Work, Accepted

Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies

Z.Lj.Petrovic, Z.M.Raspopovic, V.D.Stojanovic, J.V.Jovanovic, G.Malovic, T.Makabe, and J.de Urquijo

Appl. Surface Science 253   6619-40 2007

Research paper (scientific journal), Joint Work, Accepted

Numerical modeling of rf magnetron sputtering with metallic or dielectric target

T. Makabe and T. Yagisawa

Materials Sci. Forum 555   165-71 2007

Research paper (scientific journal), Joint Work, Accepted

Prediction of organic low-k material etching in two frequency capacitively coupled plasma

K. Ishihara, T. Shimada, T. Yagisawa, and T. Makabe

Plasma Physics and Controlled Fusion 48   B99-104 2006.11

Research paper (scientific journal), Joint Work, Accepted

Modeling of feature profile evolution in SiO2 as functions of radial position and bias voltage under competition among charging, deposition, and etching in two-frequency capacitively coupled plasma

T. Shimada, T. Yagisawa, and T. Makabe

Jpn.J.Appl.Phys. 45   8876-82 2006.11

Research paper (scientific journal), Joint Work, Accepted

Evaluation of errors in feedback control based on persistence prediction in model-vased process controller system for deep sub-100nm gate fabrication

T. Goto and T. Makabe

Jpn.J.Appl.Phys. 45   7645-54 2006

Research paper (scientific journal), Joint Work, Accepted

Self-consistent modeling of feature profile evolution in plasma etching and deposition

T. Shimada, T. Yagisawa, and T. Makabe

Jpn.J.Appl.Phys.(Exp.Lett) 45   L132-4 2006

Research paper (scientific journal), Joint Work, Accepted

A modeling of DC magnetron plasma for sputtering: transport of sputtered copper atoms

T. Yagisawa and T. Makabe

J.Vac,Sci.Technol.A 24   908-13 2006

Research paper (scientific journal), Joint Work, Accepted

Increased O(1D) metastable density in highly Ar-diluted oxygen plasmas

T. Kitajima, T. Nakano, and T. Makabe

Appl.Phys.Lett. 88   091501(3pp) 2006

Research paper (scientific journal), Joint Work, Accepted

Optical diagnostics for plasma-surface interaction in CF4/Ar radio-frequency inductively coupled plasma during Si and SiO2 etching

Y. Miyoshi, M. Miyauchi, Y. Komukai, and T. Makabe

J.Vac.Sci.Technol.A 24   1718-24 2006

Research paper (scientific journal), Joint Work, Accepted

Oxygen atom density in rare gas diluted O2 radio frequency plasma

T. Kitajima, J. Nakashima, T. Nakano, and T. Makabe

Thin Solid Films 506-507   489-93 2006

Research paper (scientific journal), Joint Work, Accepted

Rare gas metastable atom density in diluted O2 RF plasmas

T. Kitajima, K. Takahashi, T. Nakano, and T. Makabe

IEEJ Trans. FM 126   37-42 2006

Research paper (scientific journal), Joint Work, Accepted

Modeling of radial uniformity at a wafer interface in a 2f-CCP for SiO2 etching

T. Yagisawa, T. Shimada, and T. Makabe

J.Vac.Sci.Technol.B 23   2212-17 2005

Research paper (scientific journal), Joint Work, Accepted

Electron transport coefficients in O2 magnetron discharges

R. D. White, K. E. Ness, R. E. Robson, and T. Makabe

J.Phys.D 38   997-1004 2005

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients for electrons in argon in crossed electric and magnetic rf fields

Z. M. Raspopovic, D. Dujko, T. Makabe, and Z. Lj. Petrovic

Plasma Sources Sci. Technol. 14   293-300 2005

Research paper (scientific journal), Joint Work, Accepted

Three dimensional singular images of low pressure hydrogen-ICP in E-mode

Y. Miyoshi, M. Miyauchi, A. Oguni, and T. Makabe

IEEE Trans. on Plasma Sci. 33   362-3 2005

Research paper (scientific journal), Joint Work, Accepted

Time-resolved measurement of charging on hole bottoms of SiO2 wafer exposed to plasma etching in a pulsed two- frequency capacitively coupled plasma

T. Ohmori, T. K. Goto, T. Kitajima, and T. Makabe

Jpn.J.Appl.Phys.(Exp. Lett.) 44   L1105-08 2005

Research paper (scientific journal), Joint Work, Accepted

Effect of metastables on a sustaining mechanism in inductively coupled plasma in Ar

T. Sato and T. Makabe

J.Appl.Phys. 98   113304(3pp) 2005

Research paper (scientific journal), Joint Work, Accepted

Modeling of the influence of dielectric target on interface sheath characteristics in a radio-frequency magnetron sputtering

S. Kuroiwa, T. Mine, T. Yagisawa, and T. Makabe

J.Vac.Sci.Technol.B 23   2218-21 2005

Research paper (scientific journal), Joint Work, Accepted

Modeling of N2-H2 capacitively coupled plasma for low-k material etching

C-H. Shon and T. Makabe

IEEE Trans. on Plasma Sci. 32   390-8 2004.04

Research paper (scientific journal), Joint Work, Accepted

Prediction of a radial variation of plasma structure and ion distributions in the wafer interface in 2-frequency capacitively coupled plasma

T. Yagisaw, K. Maeshige, T. Shimada, and T. Makabe

IEEE Trans. on Plasma Sci. 32   90-100 2004.02

Research paper (scientific journal), Joint Work, Accepted

Influence of driving frequency on oxygen atom density in O2 radio frequency capacitively coupled plasma

T. Kitajima, K. Noro, T. Nakano, and T. Makabe

J.Phys.D 37   2670-6 2004

Research paper (scientific journal), Joint Work, Accepted

Negative charge injection to wafer in a pulsed two-frequency capacitively coupled plasma for oxide etching: diagnostics for an interface by emission selected-computerized tomography

T. Ohmori, T. Goto, and T. Makabe

J.Phys.D 37   2223-31 2004

Research paper (scientific journal), Joint Work, Accepted

Funtional separation in two frequency operation of an Inductively Coupled Plasma

T. Denda, Y. Miyoshi, T. Goto, K. Komukai, Z. Lj. Petrovic, and T. Makabe

J.Appl.Phys. 95   870-6 2004

Research paper (scientific journal), Joint Work, Accepted

Comparison of direct numerical procedure and Monte Carlo technique to determine the charging effects in submicron structures

Z. Lj. Petrovic, S. Sakadzic, N. Spasojevic, J. Matsui, and T. Makabe

Materials Sci. Forum 453-454   9-14 2004

Research paper (scientific journal), Joint Work, Accepted

Negative charge injection to a positively charged SiO2 hole exposed to plasma etching in a pulsed two-frequency capacitively coupled plasma in CF4/Ar

T. Ohmori, T. Goto, T. Kitajima, and T. Makabe

Appl.Phys.Lett. 83   4637-9 2003.11

Research paper (scientific journal), Joint Work, Accepted

Negative mobilities of electron in radio frequency fields

S. Dujko, Z. M. Raspopovic, Z. Lj. Petrovic, and T. Makabe

IEEE Trans. on Plasma Sci. 31   711-6 2003.08

Research paper (scientific journal), Joint Work, Accepted

Temporal velocity distribution of positive and negative ions incident on a wafer in a pulsed two-frequency capacitively coupled plasma in CF_4_/Ar for SiO_2_ etching

T. Yagisawa and T. Makabe

IEEE Trans. on Plasma Science 31   521-7 2003.08

Research paper (scientific journal), Joint Work, Accepted

Electron transport coefficients in SiH4 and Si2H6 in dc and rf fields

T. Shimada, Y.N akamura, Z. Lj. Petrovic, and T. Makabe

J.Phys.D: Appl.Phys. 36   1936-46 2003.07

Research paper (scientific journal), Joint Work, Accepted

Magnetron plasma structure with strong magnetic field

E. Shidoji and T. Makabe

Thin Solid Films 442   27-31 2003

Research paper (scientific journal), Joint Work, Accepted

Control of charging in high aspect ratio plasma etching of integrated circuits

Z.Lj. Petrovic and T. Makabe

TELSIKS 1   119-26 2003

Research paper (scientific journal), Joint Work, Accepted

Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography

Y. Miyoshi, Z. Lj. Petrovic, and T. Makabe

IEEE Trans. on Plasma Science 30   130-1 2002

Research paper (scientific journal), Joint Work, Accepted

Development of optical computerized tomography in CCP and ICP for plasma etching

T. Makabe and Z. Lj. Petrovic

Appl.Surf.Sci. 192   88-114 2002

Research paper (scientific journal), Joint Work, Accepted

Kinetic phenomena in electron transport in radio frequency fields

Z. Lj. Petrovic, Z. M. Raspopovic, S. Dujko, and T. Makabe

Appl.Surf.Sci. 192   1-25 2002

Research paper (scientific journal), Joint Work, Accepted

Vertically integrated computer aided design for device processing

T. Makabe and K. Maeshige

Appl.Surf.Sci 192   176-200 2002

Research paper (scientific journal), Joint Work, Accepted

Functional design of a pulsed two-frequency capacitively coupled plasma in CF4/Ar for SiO2 etching

K. Maeshige, G. Washio, T. Yagisawa, and T. Makabe

J.Appl.Phys. 91 ( 12 ) 9494-501 2002

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of a wafer interface of a pulsed two frequency capacitively oupled plasma for oxide etching by emission selected computerized tomography

T. Fujita and T. Makabe

Plasma Sources Sci & Technol 11   142-5 2002

Research paper (scientific journal), Joint Work, Accepted

Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4 mixtures

Y. Miyoshi, Z. Lj. Petrovic, and T. Makabe

J. Phys. D: Appl. Phys. 35   454-61 2002

Research paper (scientific journal), Joint Work, Accepted

Influence of gas pressure and magnetic field upon dc magnetron discharge”

E. Shidoji, K. Ness and T. Makabe

VACUUM 60   299-306 2001.03

Research paper (scientific journal), Joint Work, Accepted

The effect of topographical local charging on the etching of deep-submicron structures in SiO_2_ as a function of aspect ratio"

J. Matsui, N. Nakano, Z. Lj. Petrovic, and T. Makabe

Appl.Phys.Let. 78   883-5 2001.02

Research paper (scientific journal), Joint Work, Accepted

Radio-Frequency plasma modeling for low-temperature processing

T. Makabe

Adv.in Atomic, Molecular and Optical Physics 44   127-54 2001.01

Research paper (scientific journal), Single Work, Accepted

Future TCAD system for nanometer-scale-device manufacturing using plasma etching

T. Makabe, J. Matsui, and K. Maeshige

AIPP    2263-71 2001

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional modeling of a micro cell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source

M. Kurihara and T. Makabe

J.Appl.Phys. 89   7756-63 2001

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients and scattering cross-sections for plasma modeling in CF4-Ar mixtures: a swarm analysis

M. Kurihara, Z. Lj. Petrovic and T. Makabe

J.Phys.D: 33   2146-53 2001

Research paper (scientific journal), Joint Work, Accepted

Optical emission spectroscopy of pulsed inductively coupled plasma In Ar

K. Hioki, N. Itazu, Z. Lj. Petrovic, and T. Makabe

Jpn.J.Appl.Phys. 40   L1183-6 2001

Research paper (scientific journal), Joint Work, Accepted

Non-equillibrium plasmas in telecommunication related technologies

Z. Lj. Petrovic, Z. M. Paspopovic, and T. Makabe

TELSIKS 1   371-380 2001

Research paper (scientific journal), Joint Work, Accepted

Effect of aspect ratio on topographic dependent charging in oxide etching

J. Matsui, K. Maeshige, and T. Makabe

J.Phys.D 34   2950-5 2001

Research paper (scientific journal), Joint Work, Accepted

A series of modeling of plasma etching and damage reduction: -Vertically integrated computer aided design for device precessing-

T. Makabe, J. Matsui, and K. Maeshige

Sci.Technol.of Adv. Materials 2   547-54 2001

Research paper (scientific journal), Joint Work, Accepted

A comparative study of an unbalanced magnetron with dielectric substrate with a conventional magnetron through the use of hybrid modeling

E. Shidoji, E. Ando, and T. Makabe

Plasma Sources Sci. Technol. 8   621-6 2001

Research paper (scientific journal), Joint Work, Accepted

Predictive study of a plasma structure and function in reactive ion etcher driven by very high frequency: Validity of an extended two-dimensional relaxation continuum model

K. Maeshige, M. Hasebe, Y. Yamaguchi and T. Makabe

J.Appl.Phys. 88   4518-24 2000.10

Research paper (scientific journal), Joint Work, Accepted

Electron transport in argon in crossed electric and magnetic fields

K. Ness and T. Makabe

Phys. Rev. E 62   4083-90 2000.09

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients and scattering cross-sections for plasma modeling in CF4-Ar mixtures: a swarm analysis

M. Kurihara, Z. Lj. Petrovic, and T. Makabe

J.Phys.D 33   2146-53 2000.09

Research paper (scientific journal), Joint Work, Accepted

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

K. Kitajima, Y. Takeo, Z. Lj. Petrovic and T. Makabe

Appl.Phys.Let 77   489-91 2000.07

Research paper (scientific journal), Joint Work, Accepted

Diffusin of electronin time- dependent E(t)×B(t) fields

Z. Raspopovic, S. Sakadzic, Z. Lj. Petrovic, and T. Makabe

J.Phys.D 33   1298-1302 2000.06

Research paper (scientific journal), Joint Work, Accepted

Micro-Cell-Plasma driven by high frequency voltage source

M. Kurihara and T. Makabe

J.Plasma and Fusion Research 76   444-8 2000.05

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of an inductively coupled CF4/Ar plasm

K. Hioki, H. Hirata, S. Matsumura, Z. Lj. Petrovic and T. Makabe

J.Vac.Sci.Technol.A, 18   864-72 2000.05

Research paper (scientific journal), Joint Work, Accepted

Simulation of Magnetron Plasma

T. Makabe

J.Vac.Soc.Jpn. 43   767-72 2000.05

Research paper (scientific journal), Single Work, Accepted

Numerical study of effects of frequency in inductively coupled plasma using Particle-in-Cell/Monte Carlo simulation

J-S. Oh and T. Makabe

Jpn.J.Appl.Phys. 39   1358-64 2000.03

Research paper (scientific journal), Joint Work, Accepted

Modeling and diagnostics of two-frequency pulsed ccp and related charging in the microstructure of SiO2 trench

T. Makabe

J.Tech.Phys. 41   345-59 2000

Research paper (scientific journal), Single Work, Accepted

Two-dimesional CT images of two-frequency capacitively coupled plasma

T. Kitajima, Y. Takeo, and T. Makabe

J.Vac.Sci.Technol.A 17   2510-16 1999.11

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional modeling of a micro- cell plasma in Xe driven by high frequency

M. Kurihara and T. Makabe

IEEE Trans.on Plasma Sci. 27   1372-8 1999.10

Research paper (scientific journal), Joint Work, Accepted

Drift velocities of electrons in time varying electric fields

S. Bzenic, Z. Lj. Petrovic, and T. Makabe

Jpn.J.Appl.Phys. 38   6077-83 1999.10

Research paper (scientific journal), Joint Work, Accepted

Prediction of the evolution of the erosion profile in a direct current magnetron discharge

K. Okazawa, E. Shidoji and T. Makabe

J.Appl.Phys. 86   2984-9 1999.09

Research paper (scientific journal), Joint Work, Accepted

Dependence of driving frequency on capacitively coupled plasma in CF4

S. Segawa, M. Kurihara, N. Nakano, and T. Makabe

Jpn.J.Appl.Phys. 38   4416-22 1999.07

Research paper (scientific journal), Joint Work, Accepted

A numerical study of a collision-dominated inductively coupled plasm using article-in-Cell/Monte Carlo simulation

J-S. Oh and T. Makabe

Jpn.J.Appl.Phys. 38   4423-8 1999.07

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional self-consistent simulation of a DC magnetron discharge

E. Shidoji, H. Ohtake, N. Nakano, and T. Makabe

Jpn.J.Appl.Phys. 38   2131-6 1999.04

Research paper (scientific journal), Joint Work, Accepted

Two dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

H. Hirata, M. Tadokoro, N. Nakano, Z. Lj. Petrovic, and T. Makabe

IEEE Trans. on Plasma Sci.    50-1 1999.03

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional modeling of spatiotemporal structure of coupled plasma

K. Kamimura, K. Iyanagi, N. Nakano, and T. Makabe

Jpn.J.Appl.Phys. 38   4429-35 1999

Research paper (scientific journal), Joint Work, Accepted

Pulsed plasmas and related electron energy control for dry etching

T. Makabe and Z.Lj.Petrovic

Physics of Ionized Gases    305-325 1999

Research paper (scientific journal), Joint Work, Accepted

Numerical simulation of the discharge in d.c. magnetron sputtering

E. Shidoji, N. Nakano, and T. Makabe

Thin Solid Films 351   37-41 1999

Research paper (scientific journal), Joint Work, Accepted

Effect of frequency on the two-dimensional structure of capacitively coupled plasma in Ar

T. Kitajima, Y. Takeo, and T. Makabe

Jpn.J.Appl.Phys. 84   5928-36 1998.12

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar

M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic and T. Makabe

Phys.Rev.E 58   7823-30 1998

Research paper (scientific journal), Joint Work, Accepted

Time resolved optical emission spectroscopy of an inductively coupled plasma in argon and oxygen

M. Tadokoro, H. Hirata, N. Nakano, Z. Lj. Petrovic, and T.Makabe

Phys.Rev.E 57   R43-6 1998

Research paper (scientific journal), Joint Work, Accepted

Electoron transport to a substrate in a radio frequency capacitively coupled plasma by the Boltzmann equation

J. Matsui, M. Shibata, N. Nakano, and T.Makabe

J.Vac.Sci.Technol.A 16   294-9 1998

Research paper (scientific journal), Joint Work, Accepted

Phasespace modelling of a radiofrequency plasma interacting with surfaces

T.Makabe, J.Matsui, and N.Nakano

Pure & Appl.Chem. 70   1187-91 1998

Research paper (scientific journal), Joint Work, Accepted

A novel sustaining mechanism in capacitively coupled radio frequency plasma in oxygen.

M. Shibata, T.Makabe, and N. Nakano

Jpn.J.Appl.Phys. 37   4182-5 1998

Research paper (scientific journal), Joint Work, Accepted

Nonequilibrium plasmas for material processing in microelectronics

Z.Lj.Petrovic, and T.Makabe

Advanced Materials and Processes 282/3   47-56 1998

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of an inductively coupled plasma in oxygen

M. Tadokoro, A. Itoh, N. Nakano, Z. Lj. Petrovic, and T. Makabe

IEEE Trans. on Plasma Sci. 26   1724-32 1998

Research paper (scientific journal), Joint Work, Accepted

Charged particle transport in harmonically varying electric fields:Foundations and Phenomenology

R.E.Robson and T.Makabe

Annals of Physics 261   74-113 1997

Research paper (scientific journal), Joint Work, Accepted

The effect of laser-induced photo-detachment in O_2_ RF discharges

M.Shibata，N.Nakano and T.Makabe

J. Phys. D 30   1219-24 1997

Research paper (scientific journal), Joint Work, Accepted

The time resolved two-dimensional profile of a radiofrequency capacitively coupled plasma

T.Kitajima，M.Izawa，N.Nakano，and T.Makabe

J. Phys. D 30   1783-9 1997

Research paper (scientific journal), Joint Work, Accepted

Diffusion tensor in electron transport in gases in a radio-frequency field

K.Maeda，T.Makabe，N.Nakano，S.Bzenic，and Z.Lj.Petrovic

Phys. Rev. E 55   5901-08 1997

Research paper (scientific journal), Joint Work, Accepted

Two dimensional transport of submicron particles in CCP reactor

R. Hashido, M. Hasebe, Y. Hosokawa, N. Nakano, Y. Yamaguchi, and T.Makabe

Jpn. J. Appl. Phys. 36   3707-13 1997

Research paper (scientific journal), Joint Work, Accepted

Three dimensional optical emission tomography of an inductively coupled plasma

A.Okigawa, M.Tadokoro, A.Itoh, N.Nakano, Z.Lj.Ptorovic, and T.Makabe

Jpn. J. Appl. Phys. 36   3707-3713 1997

Research paper (scientific journal), Joint Work, Accepted

Comparative study of the characteristics between CCP and ICP by 2D-modeling / diagnostics

T. Makabe and N. Nakano

Elec.Chem.Soc.Proc. 96-12   1-10 1996

Research paper (scientific journal), Joint Work, Accepted

Tomographic images of a plasma structure and sputtered particle in a DC magnetron discharge

A.Itoh，T.Makabe， N.Shimura，and S.Tougo

IEEE Trans. on Plasma Sci. 24   109-10 1996

Research paper (scientific journal), Joint Work, Accepted

Robot assisted opotical emission tomography in an inductively coupled plasma reactor

A.Okigawa，T.Makabe，T.Shibagaki，N.Nakano， Z.Lj.Petrovic，T.Kogawa，and A.Itoh

Jpn.J.Appl.Phys. 35   1890-3 1996

Research paper (scientific journal), Joint Work, Accepted

Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

K.Kitajima，M.Izawa，R.Hashido，N.Nakano，and T.Makabe

Appl. Phys. Lett. 69   758-60 1996

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of a non-equilibrium inductively coupled plasmas in argon

A. Okigawa, Z. Petrovic, M. Tadokoro, T. Makabe, N. Nakano, and A. Itoh

Appl. Phys. Lett. 69   2644-6 1996

Research paper (scientific journal), Joint Work, Accepted

Effect of O2(a^1Δg) on plasma structure in oxygen rf discharges

M. Shibata, N. Nakano and T. Makabe

J. Appl. Phys. 80   6142-7 1996

Research paper (scientific journal), Joint Work, Accepted

Modeling of narrow gap reactive ion etcher by the relaxation continuum model

N. Nakano and T. Makabe

Physics of Ionized Gases    269-78 1996

Research paper (scientific journal), Joint Work, Accepted

Robot assisted optical emission tomography in a CCP and ICP

T.Makabe

Physics of Ionized Gases    257-68 1996

Research paper (international conference proceedings), Single Work, Accepted

Modeling of negative ion plasma (in Japanese)

T.Makabe

J.Plasma & Fusion Reseach 52   1138-43 1996

Research paper (scientific journal), Single Work, Accepted

Effect of surface material on spatio-temporal structure in O2 RF glow discharge

M.Shibata，T.Makabe，and N.Nakano

Jpn.J.Appl.Phys. 34   6230-6 1995

Research paper (scientific journal), Joint Work, Accepted

Influence of driving frequency on narrow-gap reactive-ion etching in SF6

N. Nakano and T.Makabe

J. Phys. D 28   31-9 1995

Research paper (scientific journal), Joint Work, Accepted

Study of surface charges on dielectric electrodes in a radio-frequency glow discharge

S. Kakuta, T. Kamata, T.Makabe, S. Kobayashi, K. Terai, and T. Tamagawa

J.Appl.Phys. 77   985-91 1995

Research paper (scientific journal), Joint Work, Accepted

O2 rf discharge structure in parallel plates reactor at 13.56MHz.

M.Shibata，N.Nakano, and T.Makabe

J.Appl.phys 77   6181-7 1995

Research paper (scientific journal), Joint Work, Accepted

Modeling and measurement of submicron particles in RF plasmas in Ar.

Y.Hosokawa，T.Kitajima, and T.Makabe

Aust.J.Phys 48   439-52 1995

Research paper (scientific journal), Joint Work, Accepted

Frequency variation of the mean energy of rf electron swarm.

R.E.Robson，K.Maeda，T.Makabe and R.D.White

Aust.J.Phys 48   335-46 1995

Research paper (scientific journal), Joint Work, Accepted

Recent progress and issues in low temperature plasma modeling for material processings (in Japanese)

T.Makabe

Oyo Buturi 64   547-552 1995

Research paper (scientific journal), Single Work, Accepted

Low temperature SF6 plasma and related semiconductor processings (in Japanese)

T.Makabe

IEE of Jpn. 115(8)   492-4 1995

Research paper (scientific journal), Single Work, Accepted

Radiofrequency electron swarm transport in gases

K.Maeda and T.Makabe

AIAA 160-160   333-43 1994

Research paper (scientific journal), Joint Work, Accepted

The radical transport in the narrow-gap-reactive-ion etcher in SF6 by the relaxation continuum model

N.Nakano，Z.Lj.Petrovic, and T.Makabe

Jpn.J.Appl.Phys. 33   2223-30 1994

Research paper (scientific journal), Joint Work, Accepted

Simulations of rf glow discharge in SF6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher

N.Nakano，N.Shimura，Z.Lj.Petrovic and T.Makabe

Phys. Rev. E 49   4455-65 1994

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation

R.Robson and T.Makabe

Aust.J.Phys. 47   305-14 1994

Research paper (scientific journal), Joint Work, Accepted

Influence of Ar metastable on the discharge structure in Ar and N2 mixture in RF discharges at 13.56 MHz

F.Tochikubo，Z.Lj.Petrovic，S.Kakuta，N.Nakano and T.Makabe

Jpn.J.Appl.Phys. 33   4271-5 1994

Research paper (scientific journal), Joint Work, Accepted

Time-dependent RF swarm transport by direct numerical procedure of the Boltzmann Equation

K.Maeda and T.Makabe

Jpn.J.Appl.Phys. 33   4173-6 1994

Research paper (scientific journal), Joint Work, Accepted

A study of the sustaining mechanism in an inductively coupled plasma

K.Kondo，H.Kuroda, and T.Makabe

Jpn.J.Appl.Phys. 33   4254-7 1994

Research paper (scientific journal), Joint Work, Accepted

Experimental study of very-high-frequency plasmas in H2 by spatiotemporally resolved optical emission spectroscopy

S.Kakuta，T.Kitajima，Y.Okabe and T.Makabe

Jpn. J. Appl. Phys. 33   4335-9 1994

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma

K.Kondo，H.Kuroda and T.Makabe

Appl. Phys. Lett. 65   31-3 1994

Research paper (scientific journal), Joint Work, Accepted

A correlation between particle growth and spatiotemporal RF plasma structure

T.Kamata，S.Kakuta，Y.Yamaguchi and T.Makabe

Plasma Sources Sci.Technol.3    310-13 1994

Research paper (scientific journal), Joint Work, Accepted

Radiofrequency electron swarm transport in reactive gases and plasmas

T. Makabe and K. Maeda

Physica Scripta T53   61-9 1994

Research paper (scientific journal), Joint Work, Accepted

Investigation of the ion ejection mechanisms of gallium liquid metal ion sources

Y. Nakayama and T.Makabe

J.Phys.D 26   1769-75 1993

Research paper (scientific journal), Joint Work, Accepted

Computer simulation of plasma etching (in Japanese)

T.Makabe

Plasma & Fusion Research 69   15-26 1993

Research paper (scientific journal), Single Work, Accepted

RF plasma structures and its production efficiency in the frequency range from HF to VHF.-Computational investigation-.

T. Kitamura, N. Nakano, T.Makabe, and Y. Yamaguchi

Plasma Sources Sci. Technol 2   40-5 1993

Research paper (scientific journal), Joint Work, Accepted

Theoretical analysis of electron velocity distributions and transport coefficients in HCl in a DC electric field.

N. Shimura and T.Makabe

Jpn.J.App.Phys. 32   949-54 1993

Research paper (scientific journal), Joint Work, Accepted

Electron velocity distribution function in a gas in ExB fields.

N. Shimura and T.Makabe

Appl.Phys.Lett. 62   678-80 1993

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal optical emission spectroscopy of RF discharges in SF6

Z. Petrovic, F. Tochikubo, S. Kakuta, and T.Makabe

J.Appl.Phys. 73   2163-72 1993

Research paper (scientific journal), Joint Work, Accepted

RF plasma for i-carbon deposition (in Japanese)

T.Makabe

New Diamond 9   14-9 1993

Research paper (scientific journal), Single Work, Accepted

Frequency dependence on the structure of RF glow discharges in Ar.

S. Kakuta, T.Makabe and F. Tochikubo

J.Appl.Phys. 74   4907-14 1993

Research paper (scientific journal), Joint Work, Accepted

Influence of frequency，pressure and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2 - SF6 mixtures

S. Kakuta, Z. Lj. Petrovic, and T.Makabe

J.Appl.Phys. 74   4923-31 1993

Research paper (scientific journal), Joint Work, Accepted

Modeling of physical etching based on a two-dimensional velocity distributions of ions and fast neutrals by the Boltzmann equation

T. Tokonami and T.Makabe

J. Appl. Phys. 72   3323-9 1992

Research paper (scientific journal), Joint Work, Accepted

Modeling and diagnostics of structure in RF glow discharges in Ar at 13.56 MHz

T.Makabe, N. Nakano, and Y. Yamaguchi

Phys. Rev. A 45   2520-31 1992

Research paper (scientific journal), Joint Work, Accepted

Study of the structure in RF glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

F. Tochikubo, T.Makabe, S. Kakuta, and A. Suzuki

J. Appl. Phys. 71   2143-50 1992

Research paper (scientific journal), Joint Work, Accepted

Structure of velocity distribution functions and transport parameters of electron swarm in CH4 in a DC electric field

N. Shimura and T.Makabe

J. Phys. D. 25   751-60 1992

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of DC-magnetron discharges by emission-selected CT technique

S. Miyake, A. Itoh, N. Shimura, and T.Makabe

J. Vac. Sci. Technol. A    1135-9 1992

Research paper (scientific journal), Joint Work, Accepted

Modeling of reactive non-equilibrium plasmas (in Japanese)

T.Makabe

Oyo Buturi  60   663-73 1992

Research paper (scientific journal), Single Work, Accepted

Phase transition in DC Discharges in SiH4

Y. Yamaguchi and T.Makabe

Jpn. J.Appl. Phys. 31    L1291-4 1992

Research paper (scientific journal), Joint Work, Accepted

Absolute measurement of the excitation rate and density of the excited species in an RF discharge from the optical emission spectroscopy

F. Tochikubo and T.Makabe

Meas. Sci. Technol. 2   1133-7 1991

Research paper (scientific journal), Joint Work, Accepted

Periodic behavior of electron swarm parameters in Ar in an RF Field.

I. Yamanashi, N. Goto, and T.Makabe

Trans. IEEE of Japan 111-A   168-74 1991

Research paper (scientific journal), Joint Work, Accepted

Electron swarm in a gas discharge (in Japanese)

H. Tagashira and T.Makabe

Trans. IEE of Japan 111-A   131-8 1991

Research paper (scientific journal), Joint Work, Accepted

Recent progress in microscopic modeling of an RF plasma CVD

T.Makabe

Proc.13th Symp. Ion Sources & Ion-Assisted Technol.    193-202 1990

Research paper (international conference proceedings), Single Work, Accepted

Diagnostics of high-frequency discharges in CH4 / H2 by time-and space-resolved optical emission spectroscopy

T.Kokubo, F.Tochikubo, and T.Makabe

Appl. Phys. Lett. 56   818-20 1990

Research paper (scientific journal), Joint Work, Accepted

同心円筒形DCグロー放電によるa-Si:H成膜時の基板加熱の解析

Y. Yamaguchi, S. Imano, K. Matsumura, and T.Makabe

Kagaku Kougaku Ronbunshu 16   605-13 1990

Research paper (scientific journal), Joint Work, Accepted

Time-dependent electron swarm parameters in RF fields in CH4 and H2

N. Goto and T.Makabe

J. Phys. D 23   686-93 1990

Research paper (scientific journal), Joint Work, Accepted

Investigation of the high frequency glow discharges in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy

F. Tochikubo, S. Kakuta, A. Suzuki, and T.Makabe

J. Phys. D 23   1184-92 1990

Research paper (scientific journal), Joint Work, Accepted

Influence of negative ions in RF glow discharges in SiH4 at 13.56 MHz

T.Makabe, F. Tochikubo, and N. Nishimura

Phys. Rev. A 42   3674-7 1990

Research paper (scientific journal), Joint Work, Accepted

Study of the structure in RF glow discharges in SiH4 by spatiotemporal optical emission spectroscopy.-Influence of negative ions-

F. Tochikubo, A. Suzuki, S. Kakuta, Y. Terazono, and T.Makabe

J.Appl.Phys. 68   5532-9 1990

Research paper (scientific journal), Joint Work, Accepted

Electron kineties in RF Discharges (in Nonequilibrium processes in partially ionized gases)

T.Makabe

NATO ASI.Ser.B 220   467-77 1990

Research paper (international conference proceedings), Single Work, Accepted

Diagnostics of low frequency CH4+H2 discharge by optical emission spectroscopy

T.Kokubo, F.Tochikubo, and T.Makabe

J. Phys. D 22   1281-7 1989

Research paper (scientific journal), Joint Work, Accepted

A modeling of amorphous silicon deposition in silane dc-glow dicharges

Y. Yamaguchi, A. Sumiyama, R. Hattori, Y. Morokuma, and T.Makabe

J. Phys. D 22   505-11 1989

Research paper (scientific journal), Joint Work, Accepted

Modeling of an RF glow discharge plasma

K. Okazaki, T.Makabe, and Y. Yamaguchi

Appl. Phys. Lett. 54   1742-4 1989

Research paper (scientific journal), Joint Work, Accepted

Recent theoretical advances in modeling of low pressure processing plasma

T.Makabe

Proc. Jpn. Symp. Plasma Chemistry 1   1-10 1988

Research paper (scientific journal), Single Work, Accepted

Time-behaviour of electron transport in radio-frequency fields in gases

T.Makabe and N.Goto

J. Phys. D 21   887-95 1988

Research paper (scientific journal), Joint Work, Accepted

Time-and space-resolved spectroscopy of elecron transport in low-freguency discharge plasma in argon.

T.Makabe and M.Nakaya

J.Phys.D 20   1243-9 1987

Research paper (scientific journal), Joint Work, Accepted

Influence of the finite mass-ratio on the charged-particle transport in gases.

T.Makabe

J. Phys. Soc. Japan 55   2496-9 1986

Research paper (scientific journal), Single Work, Accepted

Energy distributions of alkali ions in rare gases.

T.Makabe

Physics of Ionized Gases    153-6 1986

Research paper (scientific journal), Single Work, Accepted

Measurement of electron and ion transport in RF discharge plasma.

T.Makabe

Physics of Ionized Gases    157-9 1986

Research paper (international conference proceedings), Single Work, Accepted

Diffusion tensor of electron swarm in electric field in gases. II The influence of the conservative inelastic collisions.

T.Makabe and M.Shimoyama

J. Phy. D 19   2301-08 1986

Research paper (scientific journal), Joint Work, Accepted

Investigation of the energy distributions of cesium ions in argon. I.Drift-Tube mass identified energy analysis

T.Makabe and H.Shinada

J. Phys. D 18   2385-93 1985

Research paper (scientific journal), Joint Work, Accepted

Spectroscopic investigations of N2(A^3Σu^+）metastables in the spatial ionisation growth in nitrogen.

T.Makabe, H. Awai, and T. Mori

J.Phys.D 17   2367-76 1984

Research paper (scientific journal), Joint Work, Accepted

Diffusion tensor of electron or light ion swarm in electric fields in gases.

T.Makabe and T.Mori

J. Phys. D 17   699-708 1984

Research paper (scientific journal), Joint Work, Accepted

Time evolution of ion swarm transport in a constant mean free encounter region.

T.Makabe, K. Misawa, and T. Mori

J. Phys. D 16   1893-1900 1983

Research paper (scientific journal), Joint Work, Accepted

Anisotropic velocity distribution representation of the electron swarm in a weakly ionized gas

T.Makabe and T.Mori

Trans. IEE of Japan E 102   101-08 1982

Research paper (scientific journal), Joint Work, Accepted

Variations in electron transport in argon with temperature near the Ramsauer-Townsend minimum.

T.Makabe and T.Mori

J. Phys. D 15   1395-1402 1982

Research paper (scientific journal), Joint Work, Accepted

Velocity distribution function of ion swarm in a weakly ionised gas in a constant mean free time encounter region.

T.Makabe, K. Misawa and T. Mori

J. Phys. D 14   199-206 1981

Research paper (scientific journal), Joint Work, Accepted

Theoretical analysis of the electron energy distribution function in a weakly ionized gas under a relatively high E/N.

T.Makabe and T.Mori

J. Phys. D 13   387-96 1980

Research paper (scientific journal), Joint Work, Accepted

Electron swarm having an anisotropic velocity distribution function

T.Makabe and T.Mori

J.de Physique 40(C7)   43-4 1979

Research paper (scientific journal), Joint Work, Accepted

Exprimental and theoretical analysis of the electron energy distribution functions in Townsend discharges in xenon

T.Makabe and T.Mori

J. Phys. B: Atom Molec.Phys 11   3785-94 1978

Research paper (scientific journal), Joint Work, Accepted

Experimental determination of electron energy distribution functions in Townsend discahrges in argon

T.Makabe, T.Goto, and T.Mori

J. Phys. B: Atom Molec.Phys. 10   1781-8 1977

Research paper (scientific journal), Joint Work, Accepted

Townsend放電域へのBoltzmann方程式の適用について

T.Makabe, T.Goto, and T.Mori

Trans. IEE Japan 95-A   357-64 1975

Research paper (scientific journal), Joint Work, Accepted

弱電離ガス中の電子エネルギー分布関数ならびに輸送係数のモンテカルロ・シミュレーション

T.Makabe, T.Goto, and T.Mori

Trans. IEE Japan  93-A   229-36 1973

Research paper (scientific journal), Joint Work, Accepted

Rigorous simulation for weakly ionized gases

T.Makabe, T.Goto, and T.Mori

IEE CP  ( (9) ) 379-81 1972

Research paper (international conference proceedings), Joint Work, Accepted