Papers - Makabe, Toshiaki

Drift velocity of charged particles in gases: general relationship between drift velocities in position and velocity spaces

Toshiaki Makabe

Phys. Scr. 100   035615 (8pp)  2025.02

Research paper (scientific journal), Single Work

Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)

T. Makabe and H. Sugawara

Plasma Sources Sci. Technol. 33   093001 (23pp) 2024.09

Research paper (scientific journal), Joint Work, Accepted

Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode

Toshiaki Makabe

J. Phys. D. 56    045203 (17pp)  2023.01

Research paper (scientific journal), Single Work, Accepted

Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

Toshiaki Makabe

Jap. J. Appl. Phys. 61   026002(6pp) 2022.02

Research paper (scientific journal), Single Work, Accepted

Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 30   023001(16pp) 2021.02

Research paper (scientific journal), Single Work, Accepted

Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)

Toshiaki Makabe

Jap. J. Appl. Phys. 58   110101(21pp) 2019.11

Research paper (scientific journal), Single Work, Accepted

Metastables as a probe for low-temperature plasma characteristics in argon (Topical Review)

Toshiaki Makabe

J. Phys. D. 52   213002(21pp) 2019.02

Research paper (scientific journal), Single Work, Accepted

Velocity distribution of electrons in time-varying low-temperature plasmas: progress in theoretical procedures over the past 70 years (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 27   033001(22pp) 2018.03

Research paper (scientific journal), Single Work, Accepted

Expression for momentum-transfer scattering in inelastic collisions in electron transport in a collisional plasma

T. Makabe and R. WHITE

J.Phys.D: Appl.Phys. (IOP)  48   485205(4pp) 2015.11

Joint Work, Accepted

Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development

S. Dujko, Z. M. Raspopovic, R. D. White, T. Makabe and Z. Lj. Petrovic

Eur. Phys. J: D 68   166-(9pp) 2014

Research paper (scientific journal), Joint Work, Accepted

Effect of local gas heating on a plasma structure driven at radio frequency in a microcell in Ar at atmospheric pressure

M. Yamasaki, T. Yagisawa, and T. Makabe

Jpn. J. Appl. Phys. 53   036001(5pp) 2014

Research paper (scientific journal), Joint Work, Accepted

A set of cross sections and transport coefficients for electrons in HBr

O. Sasic, S. Dujko, T. Makabe, and Z. Lj. Petrovic

Chem. Phys. 398   154-9 2012

Research paper (scientific journal), Joint Work, Accepted

Low pressure nonequilibrium plasma for topdown nanoprocess

T. Makabe and T. Yagisawa

Plasma Sources Sci. Technol. 20   024011(12pp) 2011.04

Research paper (scientific journal), Joint Work, Accepted

Workshop on atomic and molecular collision data for plasma modelling: database needs for semiconductor plasma processing

T. Makabe and T. Tatsumi

Plasma Sources Sci. Technol. 20   024014(6pp) 2011.04

Research paper (scientific journal), Joint Work, Accepted

Actions of low- and high-energy electrons on the phase-transition between E and H modes in an inductively coupled plasma in Ar

Y. Hayashi, Y. Mitsui, T. Tatsumi, and T. Makabe

New J. Physics 13   073025(11pp) 2011

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

S. Morishita, Y. Hayashi, and T. Makabe

Plasma Sources Sci. Technol. 19   055007(4pp) 2010

Research paper (scientific journal), Joint Work, Accepted

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

T. Ohba and T. Makabe

Appl. Phys. Lett. 96   111501(3pp) 2010

Research paper (scientific journal), Joint Work, Accepted

Numerical Investigation of Relationship between Micro-Scale Pattern, Interfacial Plasma Structure, and Feature Profile during Deep-Si Etching in Two-Frequency Capacitively Coupled Plasma in SF6/O2

F. Hamaoka, T. Yagisawa, and T. Makabe

J.Phys.D: Appl. Phys. 42   075201(9pp) 2009

Research paper (scientific journal), Joint Work, Accepted

Nonequilibrium radio frequency plasma interacting with surface

T. Makabe and T. Yagisawa

Plasma Sources, Science and Technology 16   14016(9pp) 2009

Research paper (scientific journal), Joint Work, Accepted

A method for evaluations on the radiation trapping in an inductively coupled plasma in argon

C. Scharwitz and T. Makabe

J. Appl. Phys. 106   113304(8pp) 2009

Research paper (scientific journal), Joint Work, Accepted