Papers - Makabe, Toshiaki

A series of modeling of plasma etching and damage reduction: -Vertically integrated computer aided design for device precessing-

T. Makabe, J. Matsui, and K. Maeshige

Sci.Technol.of Adv. Materials 2   547-54 2001

Research paper (scientific journal), Joint Work, Accepted

A comparative study of an unbalanced magnetron with dielectric substrate with a conventional magnetron through the use of hybrid modeling

E. Shidoji, E. Ando, and T. Makabe

Plasma Sources Sci. Technol. 8   621-6 2001

Research paper (scientific journal), Joint Work, Accepted

Predictive study of a plasma structure and function in reactive ion etcher driven by very high frequency: Validity of an extended two-dimensional relaxation continuum model

K. Maeshige, M. Hasebe, Y. Yamaguchi and T. Makabe

J.Appl.Phys. 88   4518-24 2000.10

Research paper (scientific journal), Joint Work, Accepted

Electron transport in argon in crossed electric and magnetic fields

K. Ness and T. Makabe

Phys. Rev. E 62   4083-90 2000.09

Research paper (scientific journal), Joint Work, Accepted

Transport coefficients and scattering cross-sections for plasma modeling in CF4-Ar mixtures: a swarm analysis

M. Kurihara, Z. Lj. Petrovic, and T. Makabe

J.Phys.D 33   2146-53 2000.09

Research paper (scientific journal), Joint Work, Accepted

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

K. Kitajima, Y. Takeo, Z. Lj. Petrovic and T. Makabe

Appl.Phys.Let 77   489-91 2000.07

Research paper (scientific journal), Joint Work, Accepted

Diffusin of electronin time- dependent E(t)×B(t) fields

Z. Raspopovic, S. Sakadzic, Z. Lj. Petrovic, and T. Makabe

J.Phys.D 33   1298-1302 2000.06

Research paper (scientific journal), Joint Work, Accepted

Micro-Cell-Plasma driven by high frequency voltage source

M. Kurihara and T. Makabe

J.Plasma and Fusion Research 76   444-8 2000.05

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of an inductively coupled CF4/Ar plasm

K. Hioki, H. Hirata, S. Matsumura, Z. Lj. Petrovic and T. Makabe

J.Vac.Sci.Technol.A, 18   864-72 2000.05

Research paper (scientific journal), Joint Work, Accepted

Simulation of Magnetron Plasma

T. Makabe

J.Vac.Soc.Jpn. 43   767-72 2000.05

Research paper (scientific journal), Single Work, Accepted

Numerical study of effects of frequency in inductively coupled plasma using Particle-in-Cell/Monte Carlo simulation

J-S. Oh and T. Makabe

Jpn.J.Appl.Phys. 39   1358-64 2000.03

Research paper (scientific journal), Joint Work, Accepted

Modeling and diagnostics of two-frequency pulsed ccp and related charging in the microstructure of SiO2 trench

T. Makabe

J.Tech.Phys. 41   345-59 2000

Research paper (scientific journal), Single Work, Accepted

Two-dimesional CT images of two-frequency capacitively coupled plasma

T. Kitajima, Y. Takeo, and T. Makabe

J.Vac.Sci.Technol.A 17   2510-16 1999.11

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional modeling of a micro- cell plasma in Xe driven by high frequency

M. Kurihara and T. Makabe

IEEE Trans.on Plasma Sci. 27   1372-8 1999.10

Research paper (scientific journal), Joint Work, Accepted

Drift velocities of electrons in time varying electric fields

S. Bzenic, Z. Lj. Petrovic, and T. Makabe

Jpn.J.Appl.Phys. 38   6077-83 1999.10

Research paper (scientific journal), Joint Work, Accepted

Prediction of the evolution of the erosion profile in a direct current magnetron discharge

K. Okazawa, E. Shidoji and T. Makabe

J.Appl.Phys. 86   2984-9 1999.09

Research paper (scientific journal), Joint Work, Accepted

Dependence of driving frequency on capacitively coupled plasma in CF4

S. Segawa, M. Kurihara, N. Nakano, and T. Makabe

Jpn.J.Appl.Phys. 38   4416-22 1999.07

Research paper (scientific journal), Joint Work, Accepted

A numerical study of a collision-dominated inductively coupled plasm using article-in-Cell/Monte Carlo simulation

J-S. Oh and T. Makabe

Jpn.J.Appl.Phys. 38   4423-8 1999.07

Research paper (scientific journal), Joint Work, Accepted

Two-dimensional self-consistent simulation of a DC magnetron discharge

E. Shidoji, H. Ohtake, N. Nakano, and T. Makabe

Jpn.J.Appl.Phys. 38   2131-6 1999.04

Research paper (scientific journal), Joint Work, Accepted

Two dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

H. Hirata, M. Tadokoro, N. Nakano, Z. Lj. Petrovic, and T. Makabe

IEEE Trans. on Plasma Sci.    50-1 1999.03

Research paper (scientific journal), Joint Work, Accepted