Papers - Makabe, Toshiaki

A study of the sustaining mechanism in an inductively coupled plasma

K.Kondo，H.Kuroda, and T.Makabe

Jpn.J.Appl.Phys. 33   4254-7 1994

Research paper (scientific journal), Joint Work, Accepted

Experimental study of very-high-frequency plasmas in H2 by spatiotemporally resolved optical emission spectroscopy

S.Kakuta，T.Kitajima，Y.Okabe and T.Makabe

Jpn. J. Appl. Phys. 33   4335-9 1994

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma

K.Kondo，H.Kuroda and T.Makabe

Appl. Phys. Lett. 65   31-3 1994

Research paper (scientific journal), Joint Work, Accepted

A correlation between particle growth and spatiotemporal RF plasma structure

T.Kamata，S.Kakuta，Y.Yamaguchi and T.Makabe

Plasma Sources Sci.Technol.3    310-13 1994

Research paper (scientific journal), Joint Work, Accepted

Radiofrequency electron swarm transport in reactive gases and plasmas

T. Makabe and K. Maeda

Physica Scripta T53   61-9 1994

Research paper (scientific journal), Joint Work, Accepted

Investigation of the ion ejection mechanisms of gallium liquid metal ion sources

Y. Nakayama and T.Makabe

J.Phys.D 26   1769-75 1993

Research paper (scientific journal), Joint Work, Accepted

Computer simulation of plasma etching (in Japanese)

T.Makabe

Plasma & Fusion Research 69   15-26 1993

Research paper (scientific journal), Single Work, Accepted

RF plasma structures and its production efficiency in the frequency range from HF to VHF.-Computational investigation-.

T. Kitamura, N. Nakano, T.Makabe, and Y. Yamaguchi

Plasma Sources Sci. Technol 2   40-5 1993

Research paper (scientific journal), Joint Work, Accepted

Theoretical analysis of electron velocity distributions and transport coefficients in HCl in a DC electric field.

N. Shimura and T.Makabe

Jpn.J.App.Phys. 32   949-54 1993

Research paper (scientific journal), Joint Work, Accepted

Electron velocity distribution function in a gas in ExB fields.

N. Shimura and T.Makabe

Appl.Phys.Lett. 62   678-80 1993

Research paper (scientific journal), Joint Work, Accepted

Spatiotemporal optical emission spectroscopy of RF discharges in SF6

Z. Petrovic, F. Tochikubo, S. Kakuta, and T.Makabe

J.Appl.Phys. 73   2163-72 1993

Research paper (scientific journal), Joint Work, Accepted

RF plasma for i-carbon deposition (in Japanese)

T.Makabe

New Diamond 9   14-9 1993

Research paper (scientific journal), Single Work, Accepted

Frequency dependence on the structure of RF glow discharges in Ar.

S. Kakuta, T.Makabe and F. Tochikubo

J.Appl.Phys. 74   4907-14 1993

Research paper (scientific journal), Joint Work, Accepted

Influence of frequency，pressure and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N2 - SF6 mixtures

S. Kakuta, Z. Lj. Petrovic, and T.Makabe

J.Appl.Phys. 74   4923-31 1993

Research paper (scientific journal), Joint Work, Accepted

Modeling of physical etching based on a two-dimensional velocity distributions of ions and fast neutrals by the Boltzmann equation

T. Tokonami and T.Makabe

J. Appl. Phys. 72   3323-9 1992

Research paper (scientific journal), Joint Work, Accepted

Modeling and diagnostics of structure in RF glow discharges in Ar at 13.56 MHz

T.Makabe, N. Nakano, and Y. Yamaguchi

Phys. Rev. A 45   2520-31 1992

Research paper (scientific journal), Joint Work, Accepted

Study of the structure in RF glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

F. Tochikubo, T.Makabe, S. Kakuta, and A. Suzuki

J. Appl. Phys. 71   2143-50 1992

Research paper (scientific journal), Joint Work, Accepted

Structure of velocity distribution functions and transport parameters of electron swarm in CH4 in a DC electric field

N. Shimura and T.Makabe

J. Phys. D. 25   751-60 1992

Research paper (scientific journal), Joint Work, Accepted

Diagnostics of DC-magnetron discharges by emission-selected CT technique

S. Miyake, A. Itoh, N. Shimura, and T.Makabe

J. Vac. Sci. Technol. A    1135-9 1992

Research paper (scientific journal), Joint Work, Accepted

Modeling of reactive non-equilibrium plasmas (in Japanese)

T.Makabe

Oyo Buturi  60   663-73 1992

Research paper (scientific journal), Single Work, Accepted