研究発表 - 中野 誠彦
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Comparison of net production rate between 100MHz and 13.56MHz in capacitively coupled plasma in Ar by 2D optical emission spectroscopy
Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] 18th International Symposium on the Physics of Ionized Gases,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia)
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Modeling of narrow gap reactive ion etcher by the relaxation continuum model
Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] 18th International Symposium on the Physics of Ionized Gases,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia) Invited Physics of Ionized Gases, (1996)269-278
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Diagnostics of non-equilibrium inductively coupled plasmas in Argon
Akifumi Okigawa, Masahiro Tadokoro, Nobuhiko Nakano, and Toshiaki Makabe, Zoran Lj. Petrovi'c, and Akihiko Itoh
[国際会議] 18th International Symposium on the Physics of Ionized Gases,,
1996年09月,(2-6 Sep 1996, Kotor, Yugoslavia)
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Time resolved -2D- optical emission spectroscopy in rf capacitively coupled plasma
Takeshi Kitajima, Mitsutaka Izawa,Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] 13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases,
1996年08月,(27-30 Aug 1996, Poprad, Slovakia)
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A two dimensional modeling of parallel plate rf plasma in Ar
Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] 13th European Sectional Conference on the Atomic and Molecular Physics of Ionised Gases,
1996年08月,(27-30 Aug 1996, Poprad, Slovakia)
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Comparative study of the characteristics between CCP and ICP by 2D-modeling/ diagnostics
Toshiaki Makabe, and Nobuhiko Nakano
[国際会議] Electrochemical Society Proceedings,
1996年 -
2D-Spatiotemporal Structure of ICP Reactor
Kazuhiro Kamimura, Toshiaki Makabe, Nobuhiko Nakano, and Shinji Nakagami
[国際会議] IEEE International Conference on Plasma Science,
1995年06月,(5-8 June 1995, Madison, USA)
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Modeling of RF Glow Discharges by Direct Numerical Procedure of the Boltzmann Equation
Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] IEEE International Conference on Plasma Science,
1995年06月,(5-8 June 1995, Madison, USA)
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A Spatiotemporal Structure of ICP Reactor in two-dimensional model
Kazuhiro Kamimura, Toshiaki Makabe, Shinji Nakagami, and Nobuhiko Nakano
[国際会議] 187th Meeting of The Electrochemical Society,,
1995年05月,(21-26 May 1995, Reno, USA)
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Modeling of RF glow discharges in O2 by RCT model
Mari Shibata, Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics,
1994年08月 -
Modeling of RF glow discharges by direct numerical procedure of the Boltzmann equation using parallel computer
Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] The Third World Congress on Computational Mechanics (1-5 August 1994, Chiba, Japan)International Association for Computational Mechanics,
1994年08月 -
Influence of stepwise ionization in Ar and N2 mixture in RF discharges at 13.56MHz
Fumiyoshi Tochikubo, Zoran Lj. Petrovi'c, Shigeru Kakuta, Nobuhiko Nakano, and Toshiaki Makabe
[国際会議] in Proceedings of the International Conference on Reactive Plasmas,
1994年01月,(19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)207-210
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Influence of driving frequency on RF glow discharges in electronegative gases
Nobuhiko Nakano, Zoran Lj. Petrovi'c, and Toshiaki Makabe
[国際会議] in Proceedings of the International Conference on Reactive Plasmas,
1994年01月,(19-21 January, Yokohama, Japan)Japan Society of Applied Physics, (1994)81-84
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Modeling of SF6 Narrow-Gap-RIE by RCT model
Nobuhiko Nakano, Naohiko Shimura, Zoran Lj. Petrovi'c, and Toshiaki Makabe
[国際会議] in Proceedings of SYMPOSIUM on DRY PROCESS,
1993年11月,(1-2 November 1993, Tokyo, Japan),The Institute of Electrical Engineers of Japan, (1993)5-10
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Modeling of RF Glow discharges in SF6 by RCT Model
Nobuhiko Nakano, Naohiko Shimura, Zoran Lj.Petrovi'c, and Toshiaki Makabe
[国際会議] 45th Annual Gaseous Electronics Conference,
1992年10月,(22-25 October 1992, Boston, USA)
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Modeling and diagnostics of RF glow discharges in Ar
Toshiaki Makabe, Nobuhiko Nakano,Fumiyoshi Tochikubo, and Shigeru Kakuta
[国際会議] 44th Annual Gaseous Electronics Conference,
1991年10月,(27-30 October 1991, New Mexico, USA)
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Numerical Analysis of RF Glow Discharges in HCl by RCT Model
Nobuhiko Nakano, Toshiaki Makabe,Naohiko Shimura
[国際会議] 44th Annual Gaseous Electronics Conference,
1991年10月,(27-30 October 1991, New Mexico, USA)
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Modeling and optical diagnostics of reactive RF glow discharges in CH4 at 13.56MHz
Toshiaki Makabe, Nobuhiko Nakano,Akira Suzuki, Fumiyoshi Tochikubo, and Yukio Yamaguchi
[国際会議] 43rd Annual Gaseous Electronics Conference,
1990年10月,(October 1990, Champaign-Urbana, Illinois)
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Modeling and optical diagnostics of RF glow discharges in CH4 at 13.56MHz
Toshiaki Makabe, Motoo Nishimura, and Nobuhiko Nakano
[国際会議] Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases,
1990年08月,(August 1990, Orleans)