論文 - 高橋　英俊

Laser-Induced Graphene-Based Pressure Sensor With Corrugated Polyimide Diaphragm

Ryo Oda, Rihachiro Nakashima, Hidetoshi Takahashi

IEEE Sensors Journal 2025年03月

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Multi-Inlet 2-D Water Flow Vector Sensor Using a Sealed Incompressible Liquid and Neural Network for Marine Biologging

Takuto Kishimoto, Kyota Shimada, Ryusei Ando, Kenei Matsudaira, Hiroto Tanaka, Hidetoshi Takahashi

IEEE Sensors Journal 2025年03月

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Laser-Induced Graphene-Based Pressure Sensor with Corrugated Polyimide Diaphragm

Oda R., Nakashima R., Takahashi H.

IEEE Sensors Journal 25 （ 5 ） 8115 - 8123 2025年

ISSN  1530437X

　概要を見る

Until now, various types of pressure sensors, including piezoresistive and capacitive types, have been developed using the technology of microelectromechanical systems (MEMSs). However, many of these sensors require complex fabrication processes, making it challenging to form 3-D shapes. In contrast, laser-induced graphene (LIG) shows promise for use in various physical sensors due to its high sensitivity as a piezoresistive material and its simple fabrication process. Polyimide (PI) substrates, commonly used for LIG formation, can be easily grooved and cut by ultraviolet (UV) lasers, allowing for the fabrication of 3-D shapes. In this study, we propose a two-gauge corrugated-type pressure sensor with LIG strain gauges on both the top and back sides of a PI substrate featuring a corrugated structure. The fabrication process involves using a UV laser to fabricate the corrugated structure and a CO2 laser to form the LIG strain gauges. This simple process produced a sensor with dimensions of 10 mm in length, 15 mm in width, and a total thickness of 6 mm. The corrugated sensor deformed 1.8 times more under pressure and demonstrated three times greater sensitivity than the membrane-type PI sensor. This approach is effective for low low-volume production of a large variety of sensors in laboratories because it enables simple design and fabrication using only two types of lasers.

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Laser-Induced Graphene-Based Pressure Sensor with Corrugated Polyimide Diaphragm

Oda R., Nakashima R., Takahashi H.

IEEE Sensors Journal 25 （ 5 ） 8115 - 8123 2025年

ISSN  1530437X

　概要を見る

Until now, various types of pressure sensors, including piezoresistive and capacitive types, have been developed using the technology of microelectromechanical systems (MEMSs). However, many of these sensors require complex fabrication processes, making it challenging to form 3-D shapes. In contrast, laser-induced graphene (LIG) shows promise for use in various physical sensors due to its high sensitivity as a piezoresistive material and its simple fabrication process. Polyimide (PI) substrates, commonly used for LIG formation, can be easily grooved and cut by ultraviolet (UV) lasers, allowing for the fabrication of 3-D shapes. In this study, we propose a two-gauge corrugated-type pressure sensor with LIG strain gauges on both the top and back sides of a PI substrate featuring a corrugated structure. The fabrication process involves using a UV laser to fabricate the corrugated structure and a CO2 laser to form the LIG strain gauges. This simple process produced a sensor with dimensions of 10 mm in length, 15 mm in width, and a total thickness of 6 mm. The corrugated sensor deformed 1.8 times more under pressure and demonstrated three times greater sensitivity than the membrane-type PI sensor. This approach is effective for low low-volume production of a large variety of sensors in laboratories because it enables simple design and fabrication using only two types of lasers.

• Access to Document (DOI)

Laser-induced graphene based pressure sensor with corrugated polyimide diaphragm

R Oda, R Nakashima, H Takahashi

IEEE Sensors Journal 2025年

Influence of cantilever dimensions on time response characteristics of a MEMS piezoresistive-cantilever-based barometric pressure change sensor

T Kato, H Takahashi

Japanese Journal of Applied Physics 2025年

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Biaxial Glass Force Plate using Inclined Laser Induced Backside Wet Etching through a Prism

N Ono, R Nakashima, T Shiratori, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Bi-axial micro force plate utilizing dual laser displacement meters for ground reaction force measurement in fruit flies

N Ono, K Shimazaki, H Toda, H Takahashi

IEEE Sensors Journal 2025年

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Arrayed Electrical Stimulation Platform for Accurate Evaluation of Contractile Force of Ring-Shaped Engineered Heart Tissue

D Miyata, A Masuda, G Kagawa, H Tani, H Takahashi, S Tohyama, ...

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Acoustically Driven Scanning Mirror Enhanced by Helmholtz Resonator Unit

M Fukuta, R Nakashima, T Kan, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

2-Axis Force Plate for Droplet Collision Measurement using Line Scan Camera and Sampling Moiré Method

Y Nakahara, S Kato, H Onoe, C Lee, YJ Heo, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Micro Force Plate Array for Measuring 3-Axis Ground Reaction Forces in Ants Using Sampling Moiré Method

T Shiratori, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Vibration-Based Airflow Sensor with Three-Dimensional Bluff Body Structure Formed Using Laser Folding Technique on Copper-Polyimide Film

K Ohara, R Nakashima, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Three-axis force plate using high-speed line-scan camera and tilted pattern for sampling moiré method

Y Nakahara, O Nomura, T Shiratori, H Takahashi

IEEE Sensors Journal 25 （ 5 ） 8085 - 8092 2025年

ISSN  1530437X

　概要を見る

Force plates utilizing various principles capable of simultaneously measuring vertical and shear forces have been developed to analyze ground reaction force (GRF) in studies of animal locomotion mechanics. Recently, a triaxial force plate with high accuracy and measurement independence has been proposed using the sampling moiré (SM) method and a prism. The SM method can detect in-plane displacement of a pattern image with significantly higher accuracy than pixel size. However, with implementations using area-scan cameras, it was difficult to achieve both large number of pixels, which determine force resolution, and high frame rate, which affects temporal resolution. Here, we propose an SM method force plate with high accuracy and time resolution using a line-scan camera with a single vertical pixel, high horizontal resolution, and high frame rate. To realize three-axis force measurement from 1-D images, a pair of tilted patterns are utilized for SM method analysis. The fabricated force plate was calibrated and confirmed to have a force resolution of less than 35 mN for each axis and a positional error of less than 3%. Therefore, the proposed force plate can be useful for highly accurate GRF measurement with high frame rate capabilities.

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Switchable acoustic notch filter using a 3D-printed Helmholtz resonator array with bistable structures

M Fukuta, G Kagawa, H Takahashi

Extreme Mechanics Letters, 102333 2025年

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Optical Cantilever Using Diffraction Grating and Sampling Moiré Method

S Sato, T Shiratori, T Kan, H Takahashi

2025 IEEE 38th International Conference on Micro Electro Mechanical Systems … 2025年

Multi-Inlet Two-Dimensional Waterflow Vector Sensor Using a Sealed Incompressible Liquid and Neural Network for Marine Biologging

T Kishimoto, K Shimada, R Ando, K Matsudaira, H Tanaka, H Takahashi

IEEE Sensors Journal 2025年

Single-Step Fabrication of a Six-Axial Force Plate Using an FDM 3-D Printer

Nakahara Y., Takahashi H.

IEEE Sensors Journal 24 （ 7 ） 9691 - 9699 2024年04月

ISSN  1530437X

　概要を見る

Simple fabrication of customizable sensors is necessary for unique but important measurement objects. As force-sensing devices require multiple steps for fabrication, conventional techniques are not convenient for realizing tailor-made instruments. Recently, three-dimensionally (3-D) printed devices have become highly popular, especially for rapid prototyping. A 3-D printer can be used to fabricate complex structures in a single step and is ideal for fabricating custom sensors with advanced applications. In this study, we proposed a single-step fabrication method for a six-axial force plate using a fused deposition modeling dual-nozzle 3-D printer. The sensing elements were 3-D printed using electrically conductive polylactic acid filaments, and the entire force plate was fabricated in approximately one day. The device measured 230 mm, and the plate was square-shaped with dimensions of 100 mm. Calibration experiments were conducted, which confirmed that the fabricated force plate responded independently to the six-axial forces as designed. The resonant frequency was confirmed to be at least 45 Hz, and the force and moment resolutions were <5.9 mN and <4.2 mNm, respectively. Furthermore, the positional error was <3% in the Fz -direction. Therefore, the proposed fabrication method using a 3-D printer is useful for realizing a compact square-shaped sensing force plate, with a high degree of design freedom.

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Triaxial tactile sensor utilizing standing laser-induced graphene cantilevers on polyimide film

R Nakashima, H Takahashi

Sensors and Actuators A: Physical 365, 114919 （Sensors and Actuators A: Physical）  365 2024年

ISSN  09244247

　概要を見る

Microelectromechanical systems (MEMS) multiaxial tactile sensors have been developed in various fields to leverage their small size, high accuracy, and high sensitivity. Although various measurement principles have been proposed, most tactile sensors are fabricated using conventional and complicated Si processes. Conversely, laser-induced graphene (LIG) has recently attracted significant attention as a material for fabricating physical sensors due to its high sensitivity as a piezoresistor through simple laser processing. Therefore, the application of LIG to MEMS processes is expected to yield unprecedented MEMS sensor devices. In this paper, we propose a triaxial tactile sensor using standing LIG cantilevers embedded in an elastic body. The proposed sensing element was fabricated using ultraviolet (UV) laser irradiation to shape a polyimide film into cantilever structures and CO2 laser irradiation to form LIG strain gauges. Subsequently, the flat LIG cantilevers were stood up using thermal deformation. These multiple three-dimensional LIG cantilever elements enable multiaxial force measurements. The cantilever and elastic body portion of the sensor had dimensions of 3 × 3 × 0.2 mm and 12.5 × 12.5 × 3 mm, respectively. The fabricated sensor response was evaluated, and its capability to independently measure triaxial forces was verified. Therefore, the proposed simple and reproducible fabrication process is useful for realizing compact multiaxial tactile sensors.

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Triaxial force plate with prism imaging and sampling moiré method

O Nomura, H Takahashi

IEEE Sensors Journal 24 （ 7 ） 9671 - 9678 2024年

ISSN  1530437X

　概要を見る

Many studies have been conducted on the locomotion of terrestrial animals to evaluate ground reaction forces (GRFs) using a force plate. Conventional force plates typically utilize strain gauges, but there are challenges in developing small force plates. While force plates with noncontact type sensors have been developed, these are not suitable for multiaxial measurement. On the other hand, the sampling moiré (SM) method has garnered attention as a high-resolution in-plane measurement technique. This study proposes a force plate capable of triaxial force measurement with a single camera using the SM method. The proposed force plate comprises a plate, spring structure, 2-D grating, prism, and camera. Three directional displacements are measured from images that have two inclined grating images (GIs) before and after displacement by the SM method. In this study, we designed and fabricated a 25×25 mm force plate element with a resonant frequency of approximately 100 Hz. The fabricated force plate independently enabled three-axis measurements, with each axial force resolution < 1 mN, and the positional error for vertical forces remaining within ±3%. Therefore, the proposed sensor can be utilized for evaluating GRFs of small animals.

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