論文 - 高橋　英俊

銅の超臨界流体薄膜堆積法によるナノホール型シリコン赤外ディテクタ

安永 竣, 高橋 英俊, 菅 哲朗, 塚越 拓哉, 百瀬 健, 高畑 智之, 下山 勲

応用物理学会学術講演会講演予稿集 （公益社団法人 応用物理学会）  2018.1   3128 - 3128 2018年03月

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Cellular dynamics of bovine aortic smooth muscle cells measured using MEMS force sensors

Takuya Tsukagoshi, Thanh-Vinh Nguyen, Kayoko Hirayama-Shoji, Hidetoshi Takahashi, Kiyoshi Matsumoto and Isao Shimoyama

Journal of Physics D: Applied Physics （Journal of Physics D: Applied Physics）  51 （ 14 ） 145401 2018年03月

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  00223727

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© 2018 IOP Publishing Ltd. Adhesive cells perceive the mechanical properties of the substrates to which they adhere, adjusting their cellular mechanical forces according to their biological characteristics. This mechanical interaction subsequently affects the growth, locomotion, and differentiation of the cell. However, little is known about the detailed mechanism that underlies this interaction between adherent cells and substrates because dynamically measuring mechanical phenomena is difficult. Here, we utilize microelectromechamical systems force sensors that can measure cellular traction forces with high temporal resolution (∼2.5 μs) over long periods (∼3 h). We found that the cellular dynamics reflected physical phenomena with time scales from milliseconds to hours, which contradicts the idea that cellular motion is slow. A single focal adhesion (FA) generates an average force of 7 nN, which disappears in ms via the action of trypsin-ethylenediaminetetraacetic acid. The force-changing rate obtained from our measurements suggests that the time required for an FA to decompose was nearly proportional to the force acting on the FA.

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Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama-Shoji, Takuya Tsukagoshi, Tomoyuki Takahata and Isao Shimoyama

Journal of Micromechanics and Microengineering （Journal of Micromechanics and Microengineering）  28 （ 4 ） 045013 2018年02月

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  0960-1317

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© 2018 IOP Publishing Ltd. This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 μN and 0.1 μm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

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Analysis of THz Response of Frame Structures for Achieving Thin-film-type Metamaterials

A Isozaki, T Kan, H Takahashi, K Matsumoto, I Shimoyama

IEEJ Transactions on Sensors and Micromachines 138, 281-286 （IEEJ Transactions on Sensors and Micromachines）  138 （ 7 ） 281 - 286 2018年

ISSN  13418939

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© 2018 The Institute of Electrical Engineers of Japan. In this paper, we report on analytical results of terahertz (THz)-wave response of frame structures that support a thin film where metamaterial elements exist. Since the transmittance spectra of the metamaterial including the support frames differ from those of the metamaterial elements excluding the frames, investigation of influences of the frames on the measured spectra is important. A preliminary analysis revealed that the spectra of the metamaterial elements are partially recovered by compensating the measured spectra using time-domain transmittance waves of a bulk silicon-on-insulator wafer, from which the support frames are made. We experimentally demonstrate that the spectra of the support frames depend on the width, but not on the pitch, of the frames. Moreover, we show that a slab-type waveguide model can explain the interference between the support frames and the incident THz waves. The physical mechanism of THz response of support frames, which are clarified in this article, will be helpful to design thin-film type metamaterials.

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Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array

H Takahashi, I Shimoyama

2018 IEEE Micro Electro Mechanical Systems (MEMS), 214-217 （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）  2018-January   214 - 217 2018年

ISSN  9781538647820

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© 2018 IEEE. This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.

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Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever

M Oshita, H Takahashi, T Kan

2018 IEEE Micro Electro Mechanical Systems (MEMS), 688-691 （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）  2018-January   688 - 691 2018年

ISSN  9781538647820

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© 2018 IEEE. This paper reports on a miniaturization method of near-infrared spectrometer based on a plasmonic near-infrared photodetector. The spectrometer has an n-typed Si cantilever with an Au diffraction grating for Surface Plasmon Resonance (SPR) generation. Mechanical vibration of the cantilever provides alternation of the angle of incidence of the light to be measured. Coupled to SPR, the light energy is transduced to photocurrent. Since the different incident angle corresponds to different SPR resonant wavelength, the electrical measurement data of photocurrent during the cantilever vibration provides the whole spectrum information of the incident light. In this time, we developed a spectrometer device and measured time varying series of photocurrent during the cantilever vibration. Waveforms of the series were clearly dependent on the incident wavelength, and coherent to the SPR theory.

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Load dependency measurement of IPS cell-derived cardiomyocytes' contraction

K Matsudaira, H Takahashi, KH Shoji, TV Nguyen, T Tsukagoshi, ...

2018 IEEE Micro Electro Mechanical Systems (MEMS), 129-132 （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）  2018-January   129 - 132 2018年

ISSN  9781538647820

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© 2018 IEEE. In this paper, we propose a method to evaluate relationships between twitch forces and static stretch stimuli of iPS cell-derived cardiomyocytes (iPSC-CMs) (force-length relation). The method realized the twitch force measurement of iPSC-CMs statically stretched under the culturing condition. As a result, twitch forces of a few tens of μΝ were measured, and the variation of twitch forces was observed as the static stretch was increased.

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High sensitive and large area force plate for ground reaction force measurement of ant running

S Kohyama, H Takahashi, T Takahata, I Shimoyama

2018 IEEE Micro Electro Mechanical Systems (MEMS), 874-877 （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）  2018-January   874 - 877 2018年

ISSN  9781538647820

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© 2018 IEEE. This paper reports on a MEMS force plate for measurement of total ground reaction force (GRF) of an ant during running. To achieve both high force sensitivity and ensuring area for ant running with several steps, the MEMS force plate consisted of two cantilever chips and one plate which were fabricated separately. The force plate was designed to measure vertical directional force with the force resolution under 0.5 μΝ. Using the fabricated MEMS force plate, we measured the GRF of Messor aciculatus. The results showed that the fluctuation of the ground reaction force was 3.7 % to the body weight of the ant.

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Ground effect measurement of butterfly take-off

T Hagiwara, H Takahashi, T Takahata, I Shimoyama

2018 IEEE Micro Electro Mechanical Systems (MEMS), 832-835 （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）  2018-January   832 - 835 2018年

ISSN  9781538647820

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© 2018 IEEE. This paper reports on a measurement of ground effect during a butterfly taking-off. We developed a differential pressure sensor array and a force plate to measure the pressure distribution on the ground and jumping force of legs, respectively. The force caused by the ground effect was evaluated as the integration of the pressure distribution. The aerodynamic force of wings was obtained from the jumping force and the acceleration of the taking-off motion. The acceleration was obtained from high-speed camera images. The result showed that the force on the ground was approximately 40% of the aerodynamic force.

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Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element

I Shimoyama, K Matsumoto, H Takahashi, MD Nguyen, T Uchiyama, ...

US Patent 9,995,642 2018年

Evaluation of ground slippery condition during walk of bipedal robot using MEMS slip sensor

T Okatani, H Takahashi, T Takahata, I Shimoyama

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems … （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）     1033 - 1035 2017年

ISSN  9781509050789

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© 2017 IEEE. This paper reports on a method to evaluate ground slippery condition using a MEMS slip sensor. The sensor discriminates between ground slippery and non-slippery conditions during walking motions of a bipedal robot, which enables the robot to prevent a slip. First, we evaluated the responses of the sensor pressed against an oiled or non-oiled surface. Then, we proposed a discriminating method between the oiled and non-oiled surfaces using the sensor. Finally, we demonstrated that a bipedal robot was able to evaluate the slippery condition of the ground where the foot of the robot landed during walk.

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Force Measurement by MEMS Sensors during Ant Running

H TAKAHASHI, I SHIMOYAMA

Journal of the Visualization Society of Japan 37 (144), 20-23 （可視化情報学会）  37 （ 144 ） 20 - 23,図巻頭1p 2017年

ISSN  0916-4731

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Biomimetics and Visualization

H TANAKA, H TAKAHASHI

Journal of the Visualization Society of Japan 37 (144), 2-2 （社団法人 可視化情報学会）  37 （ 144 ） 2 - 2 2017年

ISSN  0916-4731

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Gas sensor

I Shimoyama, K Matsumoto, KAN Tetsuo, Y Takei, H Takahashi, K Ishizu, ...

US Patent 9,546,948 2017年

How merging droplets jump off a superhydrophobic surface: Measurements and model

T Mouterde, TV Nguyen, H Takahashi, C Clanet, I Shimoyama, D Quéré

Physical Review Fluids 2 (11), 112001 （Physical Review Fluids）  2 （ 11 ） 112001(R) 2017年

研究論文（学術雑誌）, 共著, 査読有り,  ISSN  2469-990X

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© 2017 American Physical Society. We investigate how drops merging on a nonwettable surface jump off this surface, for both symmetric and asymmetric coalescences. For this purpose, we design and build a microelectromechanical system sensor able to quantify forces down to the micro-Newton scale at a high acquisition rate (200 kHz). Using this device, we perform direct force measurements of self-propelled droplets coupled to high-speed imaging. Experimental data show that the total momentum of the drop after coalescence mainly depends on the size of the smaller drop. Exploiting this finding, we quantitatively predict the takeoff speed of jumping drop pairs and show how to correct the usual argument based on energy conservation.

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Jumping force of coalescing droplets on a superhydrophobic surface

TV Nguyen, T Mouterde, H Takahashi, D Quéré, I Shimoyama

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems … （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）     95 - 98 2017年

ISSN  9781509050789

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© 2017 IEEE. We report a method to directly measure the jumping force during the coalescence of two water droplets on a superhydrophobic surface using a MEMS-based force sensor as shown in Figure 1(a). The sensor is designed to measure the jumping force during the coalescence of two droplets whose radii are several hundred μm. The measurement results show that the maximum jumping force could be more than 10 times larger than the total weight of the merged droplet. Moreover, the impulse calculated from the measured force was on the same order with the jumping momentum of the droplet. Therefore, our sensor is a useful tool to investigate the mechanism of coalescence-induced droplet jumping.

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Maximum force capacity of legs of a fruit fly during landing motion

H Takahashi, R Furuya, T Yano, K Ito, T Takahata, I Shimoyama

2017 19th International Conference on Solid-State Sensors, Actuators and … （TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems）     1061 - 1064 2017年

ISSN  9781538627310

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© 2017 IEEE. This paper reports on measurement of landing force of a fruit fly (Drosophila melanogaster) using a MEMS force plate. By measuring the landing force of fruit flies, we found that the maximum force correlated with the landing velocity, which varied from several to 80 times larger than its weight. The experimental result suggested that there was the threshold value of the maximum landing force per weight for legs, which determined that a fruit fly lands with contacting with six legs or colliding bodily to the ground according to the landing velocity. The threshold value was thought to be the maximum force capacity of legs during landing motion.

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MEMS FORCE AND DISPLACEMENT SENSOR FOR MEASURING SPRING CONSTANT OF HYDROGEL MICROPARTICLES

Kohyama S., Takahashi H., Yoshida S., Onoe H., Shoji K. H., Tsukagoshi T., Takahata T., Shimoyama I.

30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) （Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)）     1040 - 1043 2017年

ISSN  9781509050789

　概要を見る

© 2017 IEEE. This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

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MEMS-based pressure sensor with a superoleophobic membrane for measuring droplet vibration

TV Nguyen, H Takahashi, I Shimoyama

2017 19th International Conference on Solid-State Sensors, Actuators and … （TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems）     1152 - 1155 2017年

ISSN  9781538627310

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© 2017 IEEE. We report on a sensor design to measure the vibration of small droplets. The sensor consists of a piezoresistive cantilever and a chamber covered with a superoleophobic membrane. The vibration of a droplet on the membrane causes the pressure of the chamber to change. Since the cantilever is able to detect a pressure change of less than 0.1 Pa, the vibration of the droplet can be precisely measured by the cantilever. In comparison to previously developed MEMS-based force sensor to measure the droplet vibration, the current sensor design offers several benefits including: wide range of usable liquids, simple sensing scheme (only one sensor is required) and capability to be disposable. With these advantages, our method is believed to be useful in measuring viscosity of small droplet for point-of-care application.

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Pressure sensor

I Shimoyama, K Matsumoto, H Takahashi, MD Nguyen, T Uchiyama, ...

US Patent App. 15/116,967 2017年