論文 - 真壁　利明

Drift velocity of charged particles in gases: general relationship between drift velocities in position and velocity spaces

Toshiaki Makabe

Phys. Scr. 100   035615 (8pp)  2025年02月

研究論文（学術雑誌）, 単著

Historical development of electron swarm physics based on the Boltzmann equation towards in-depth understanding of a low-temperature collisional plasma (Topical Review)

T. Makabe and H. Sugawara

Plasma Sources Sci. Technol. 33   093001 (23pp) 2024年09月

研究論文（学術雑誌）, 共著, 査読有り

Current status and new insights about the capacitively coupled electronegative plasma source: injection of energetic beam-like electrons to electrode

Toshiaki Makabe

J. Phys. D. 56    045203 (17pp)  2023年01月

研究論文（学術雑誌）, 単著, 査読有り

Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

Toshiaki Makabe

Jap. J. Appl. Phys. 61   026002(6pp) 2022年02月

研究論文（学術雑誌）, 単著, 査読有り

Review and current status: E-H mode transition in low-temperature ICP and related electron dynamics (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 30   023001(16pp) 2021年02月

研究論文（学術雑誌）, 単著, 査読有り

Current status and nature of high-frequency electronegative plasmas: basis for material processing in device manufacturing (Invited Review)

Toshiaki Makabe

Jap. J. Appl. Phys. 58   110101(21pp) 2019年11月

研究論文（学術雑誌）, 単著, 査読有り

Metastables as a probe for low-temperature plasma characteristics in argon (Topical Review)

Toshiaki Makabe

J. Phys. D. 52   213002(21pp) 2019年02月

研究論文（学術雑誌）, 単著, 査読有り

Velocity distribution of electrons in time-varying low-temperature plasmas: progress in theoretical procedures over the past 70 years (Topical Review)

Toshiaki Makabe

Plasma Sources Sci. Technol. 27   033001(22pp) 2018年03月

研究論文（学術雑誌）, 単著, 査読有り

Expression for momentum-transfer scattering in inelastic collisions in electron transport in a collisional plasma

T. Makabe and R. WHITE

J.Phys.D: Appl.Phys. （IOP）  48   485205(4pp) 2015年11月

共著, 査読有り

Monte Carlo analysis of ionization effects on spatiotemporal electron swarm development

S. Dujko, Z. M. Raspopovic, R. D. White, T. Makabe and Z. Lj. Petrovic

Eur. Phys. J: D 68   166-(9pp) 2014年

研究論文（学術雑誌）, 共著, 査読有り

Effect of local gas heating on a plasma structure driven at radio frequency in a microcell in Ar at atmospheric pressure

M. Yamasaki, T. Yagisawa, and T. Makabe

Jpn. J. Appl. Phys. 53   036001(5pp) 2014年

研究論文（学術雑誌）, 共著, 査読有り

A set of cross sections and transport coefficients for electrons in HBr

O. Sasic, S. Dujko, T. Makabe, and Z. Lj. Petrovic

Chem. Phys. 398   154-9 2012年

研究論文（学術雑誌）, 共著, 査読有り

Low pressure nonequilibrium plasma for topdown nanoprocess

T. Makabe and T. Yagisawa

Plasma Sources Sci. Technol. 20   024011(12pp) 2011年04月

研究論文（学術雑誌）, 共著, 査読有り

Workshop on atomic and molecular collision data for plasma modelling: database needs for semiconductor plasma processing

T. Makabe and T. Tatsumi

Plasma Sources Sci. Technol. 20   024014(6pp) 2011年04月

研究論文（学術雑誌）, 共著, 査読有り

Actions of low- and high-energy electrons on the phase-transition between E and H modes in an inductively coupled plasma in Ar

Y. Hayashi, Y. Mitsui, T. Tatsumi, and T. Makabe

New J. Physics 13   073025(11pp) 2011年

研究論文（学術雑誌）, 共著, 査読有り

Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

S. Morishita, Y. Hayashi, and T. Makabe

Plasma Sources Sci. Technol. 19   055007(4pp) 2010年

研究論文（学術雑誌）, 共著, 査読有り

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

T. Ohba and T. Makabe

Appl. Phys. Lett. 96   111501(3pp) 2010年

研究論文（学術雑誌）, 共著, 査読有り

Nonequilibrium radio frequency plasma interacting with surface

T. Makabe and T. Yagisawa

Plasma Sources, Science and Technology 16   14016(9pp) 2009年

研究論文（学術雑誌）, 共著, 査読有り

Numerical Investigation of Relationship between Micro-Scale Pattern, Interfacial Plasma Structure, and Feature Profile during Deep-Si Etching in Two-Frequency Capacitively Coupled Plasma in SF6/O2

F. Hamaoka, T. Yagisawa, and T. Makabe

J.Phys.D: Appl. Phys. 42   075201(9pp) 2009年

研究論文（学術雑誌）, 共著, 査読有り

A method for evaluations on the radiation trapping in an inductively coupled plasma in argon

C. Scharwitz and T. Makabe

J. Appl. Phys. 106   113304(8pp) 2009年

研究論文（学術雑誌）, 共著, 査読有り